公开(公告)号：US20210376222A1

公开(公告)日：2021-12-02

申请号：US17337301

申请日：2021-06-02

申请人： INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY

发明人： Hyung Ho PARK ,  Kyung Mun KANG ,  Yue WANG ,  Min Jae KIM ,  Chabungbam Akendra SINGH ,  Chan LEE

IPC分类号： H01L41/187 ,  H01L41/27 ,  C23C16/455 ,  H01L41/319 ,  H01L41/316 ,  C09K11/55 ,  H01L41/113

摘要： Provided are a piezoluminescence structure, a piezoelectric structure, a manufacturing method thereof, and a high-sensitivity pressure sensor using the same. The piezoelectric structure includes: a plurality of perovskite material layers each including a material having an AnBnO3n perovskite structure; and interlayers inserted between the plurality of perovskite material layers and including A*O which is a metal oxide having reaction resistance to CO2. Here, A and A* are different elements and are one of an alkaline earth metal element, an alkali metal element, a lanthanide element, and a post-transition metal element, B is a transition metal element, O is an oxygen element, and n is a positive (+) integer. The piezoelectric structure may be a piezoluminescence structure.