公开(公告)号：US20160377492A1

公开(公告)日：2016-12-29

申请号：US15192466

申请日：2016-06-24

Applicant: INDUSTRIY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY

Inventor： Seung-Beck LEE ,  Onejae SUL

IPC: G01L1/14

CPC classification number: G01L1/005 ,  G01L1/148 ,  G01L1/2293 ,  G01L5/228 ,  G01L9/0098 ,  H01L29/1606 ,  H01L29/66015 ,  H01L29/66045 ,  H01L29/778 ,  H01L29/84

Abstract: A pressure sensing device having a Dirac material and a method of operating the same are provided. The pressure sensing device includes a Dirac material pattern disposed on a substrate and having a band structure in which Dirac cones meet at a Dirac point. A source electrode and a drain electrode are respectively connected to the Dirac material pattern. A spacer layer including a cavity on the Dirac material pattern is disposed on the substrate. A gate electrode overlapping the Dirac material pattern is disposed on the cavity.

Abstract translation: 提供了具有狄拉克材料的压力感测装置及其操作方法。 压力感测装置包括设置在基板上的狄拉克材料图案，并且具有狄拉克锥在狄拉克点处相遇的带状结构。 源电极和漏电极分别连接到狄拉克材料图案。 在狄拉克材料图案上包括空腔的间隔层设置在基底上。 与狄拉克材料图案重叠的栅电极设置在空腔上。