公开(公告)号：US08514390B2

公开(公告)日：2013-08-20

申请号：US13646026

申请日：2012-10-05

Applicant: Industrial Technology Research Institute

Inventor： Kuo-Tung Tiao ,  Jau-Jiu Ju ,  Guo-Zua Wu ,  Tai-Ting Huang ,  Yuan-Chin Lee ,  Rung-Ywan Tsai

IPC: G01N21/00 ,  G01N21/47

CPC classification number: G01N21/88 ,  G01N15/1434 ,  G01N21/645 ,  G01N35/00069 ,  G01N2015/1006 ,  G01N2015/1443 ,  G02B21/0004 ,  G02B21/365

Abstract: An optical equipment for inspecting and addressing a specimen is disclosed. The optical equipment comprises an optical device and a processing module. The optical device comprises a light source, a sample inspecting device and an address detecting device. The sample inspecting device comprises a first objective lens and a first detector. A beam is focused on a sample placed in an inspected site of a specimen by the first objective lens. The address detecting device comprises a second objective lens and a second detector. A beam is focused on the address coding site by the second objective lens. The processing module controls the beam to be focused on the sampling points of the inspected site to generate first optical signals, and simultaneously controls the beam of the light source to be focused on the corresponding address codes of the address coding site to generate second optical signals.

Abstract translation: 公开了一种用于检查和寻址试样的光学设备。 光学设备包括光学装置和处理模块。 光学装置包括光源，样本检查装置和地址检测装置。 样品检查装置包括第一物镜和第一检测器。 光束聚焦在通过第一物镜放置在样本的检查位置的样品上。 地址检测装置包括第二物镜和第二检测器。 光束通过第二物镜聚焦在地址编码位置。 处理模块控制要聚焦在被检测位置的采样点上的光束以产生第一光信号，同时控制光源的光束被聚焦在地址编码位置的相应地址码上，以产生第二光信号 。

公开(公告)号：US20130094018A1

公开(公告)日：2013-04-18

申请号：US13646026

申请日：2012-10-05

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Kuo-Tung Tiao ,  Jau-Jiu Ju ,  Guo-Zua Wu ,  Tai-Ting Huang ,  Yuan-Chin Lee ,  Rung-Ywan Tsai

IPC: G01N21/88

CPC classification number: G01N21/88 ,  G01N15/1434 ,  G01N21/645 ,  G01N35/00069 ,  G01N2015/1006 ,  G01N2015/1443 ,  G02B21/0004 ,  G02B21/365

Abstract: An optical equipment for inspecting and addressing a specimen is disclosed. The optical equipment comprises an optical device and a processing module. The optical device comprises a light source, a sample inspecting device and an address detecting device. The sample inspecting device comprises a first objective lens and a first detector. A beam is focused on a sample placed in an inspected site of a specimen by the first objective lens. The address detecting device comprises a second objective lens and a second detector. A beam is focused on the address coding site by the second objective lens. The processing module controls the beam to be focused on the sampling points of the inspected site to generate first optical signals, and simultaneously controls the beam of the light source to be focused on the corresponding address codes of the address coding site to generate second optical signals.

Abstract translation: 公开了一种用于检查和寻址试样的光学设备。 光学设备包括光学装置和处理模块。 光学装置包括光源，样本检查装置和地址检测装置。 样品检查装置包括第一物镜和第一检测器。 光束聚焦在通过第一物镜放置在样本的检查位置的样品上。 地址检测装置包括第二物镜和第二检测器。 光束通过第二物镜聚焦在地址编码位置。 处理模块控制聚焦在被检查位点的采样点上的光束以产生第一光信号，同时控制光源的光束被聚焦在地址编码位置的相应地址码上以产生第二光信号 。