公开(公告)号：US11939268B2

公开(公告)日：2024-03-26

申请号：US17133270

申请日：2020-12-23

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Kuo-Chuang Chiu ,  Tzu-Yu Liu ,  Tien-Heng Huang ,  Tzu-Chi Chou ,  Cheng-Ting Lin

IPC: C04B35/64 ,  C04B35/14 ,  C04B35/628

CPC classification number: C04B35/64 ,  C04B35/14 ,  C04B35/62807 ,  C04B2235/5204 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/96

Abstract: A method of forming low-k material is provided. The method includes providing a plurality of core-shell particles. The core of the core-shell particles has a first ceramic with a low melting point. The shell of the core-shell particles has a second ceramic with a low melting point and a low dielectric constant. The core-shell particles are sintered and molded to form a low-k material. The shell of the core-shell particles is connected to form a network structure of a microcrystal phase.