公开(公告)号：US3880409A

公开(公告)日：1975-04-29

申请号：US43358474

申请日：1974-01-15

Applicant: IN LINE TECHNOLOGY INC

Inventor： BOK HENDRIK F ,  ST ONGE EUGENE

IPC: C04B41/53 ,  G03D3/10 ,  G03D5/04 ,  G03F7/30 ,  H05K3/00 ,  B01F5/20 ,  C23B3/12

CPC classification number: H05K3/0085 ,  C04B41/5353 ,  G03D3/10 ,  G03D5/04 ,  G03F7/3085

Abstract: A solution agitation system to provide a uniform and controlled turbulent flow of treatment liquid over both sides of a flat substrate which is suspended in a treatment solution, wherein a directed liquid spray pattern below the treatment solution level creates parallel, flowing walls of solution running downward through the tank and on each opposite side of the substrate.

Abstract translation: 一种溶液搅拌系统，其在悬浮在处理溶液中的平坦基底的两侧上提供均匀且受控制的处理液湍流，其中在处理液液面以下的定向液体喷雾图案产生平行的流动的溶液壁向下流动 通过罐和基板的每个相对侧。