FIXTURES AND RELATED SYSTEMS AND METHODS

    公开(公告)号:US20220063147A1

    公开(公告)日:2022-03-03

    申请号:US17460615

    申请日:2021-08-30

    申请人: ILLUMINA, INC.

    摘要: Fixtures and related system and methods are disclosed. In accordance with an implementation, a method includes applying a resin onto a substrate and positioning the substrate on over a chuck of a base of a fixture. The method also includes moving a mold into engagement with the resin and curing the resin. The method also includes detaching the mold and the resin and, while detaching the mold and the resin, determining a detachment force applied as a function of a distance of detachment between the mold and the resin.