MULTI-LAYER HIGH-EFFICIENCY DIELECTRIC GRATING WITH IMPROVED MANUFACTURABILITY

    公开(公告)号:US20240201426A1

    公开(公告)日:2024-06-20

    申请号:US18382366

    申请日:2023-10-20

    CPC classification number: G02B5/1857 G02B5/1861 G02B5/1866

    Abstract: Systems and methods are provided for multi-layer high-efficiency dielectric grating with improved manufacturability. An example diffraction grating based morphology includes a plurality of grating lines; a plurality of intermediate layers; and a substrate bearing both of the plurality of grating lines and the plurality of intermediate layers; where one or more of the plurality of grating lines include a plurality of grating layers; and where at least two of the plurality of grating layers include different refractive index (RI) material. The plurality of grating layers includes one or more layers having low refractive index (RI) material and one or more layers having high refractive index (RI) material. The plurality of intermediate layers includes a plurality of matching layers and a plurality of dielectric layers.

    MULTI-LAYER DIELECTRIC COATINGS FOR HIGH-EFFICIENCY DIELECTRIC GRATINGS

    公开(公告)号:US20250130355A1

    公开(公告)日:2025-04-24

    申请号:US18382370

    申请日:2023-10-20

    Abstract: Systems and methods are provided for multi-layer dielectric coatings for high-efficiency dielectric gratings. A immersion grating based morphology includes a plurality of grating lines, an intermediate multi-layer structure, and a substrate bearing both of the plurality of grating lines and the intermediate multi-layer structure, with the intermediate multi-layer structure including a plurality of intermediate layers, and with the intermediate multi-layer structure configured to improve performance of the immersion grating based on predetermined performance criteria including, at least, reflective losses based performance. A transmission grating based morphology includes a plurality of grating lines, an intermediate multi-layer structure, and a substrate bearing both of the plurality of grating lines and the intermediate multi-layer structure, with the intermediate multi-layer structure including a plurality of intermediate layers, and with the intermediate multi-layer structure configured to improve performance of the transmission grating based on predetermined performance criteria including, at least, reflective losses based performance.

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