公开(公告)号：US20250138516A1

公开(公告)日：2025-05-01

申请号：US18692102

申请日：2022-12-23

Applicant: Hitachi High-Tech Corporation

Inventor： Tatsuya MARUYAMA ,  Junichi KITAMURA ,  Koichi YAMAMOTO ,  Yuji SUGAYA

IPC: G05B19/418 ,  H01J37/32

Abstract: A control communication system and a plasma processing apparatus for efficient utilization of a computer resource and a communication resource such as a storage area. A control communication system includes a control communication apparatus that includes a communication unit configured to transmit a packet including control data and in which the communication unit includes a plurality of ports, and a plurality of device groups that are communicably connected to the plurality of communication ports and are operated according to the received packet. The control data is generated toward a target communication port among the plurality of communication ports, the target communication port being determined based on information of a communication port that transmits the packet. The packet includes a packet data area in which the control data is arranged, and is transmitted from the target communication port to the device group connected to the target communication port.