PLASMA PROCESSING APPARATUS AND COMMUNICATION SYSTEM FOR CONTROL OF PLASMA PROCESSING APPARATUS

    公开(公告)号:US20250138516A1

    公开(公告)日:2025-05-01

    申请号:US18692102

    申请日:2022-12-23

    Abstract: A control communication system and a plasma processing apparatus for efficient utilization of a computer resource and a communication resource such as a storage area. A control communication system includes a control communication apparatus that includes a communication unit configured to transmit a packet including control data and in which the communication unit includes a plurality of ports, and a plurality of device groups that are communicably connected to the plurality of communication ports and are operated according to the received packet. The control data is generated toward a target communication port among the plurality of communication ports, the target communication port being determined based on information of a communication port that transmits the packet. The packet includes a packet data area in which the control data is arranged, and is transmitted from the target communication port to the device group connected to the target communication port.

    DISTRIBUTED CONTROL SYSTEM AND SEMICONDUCTOR INSPECTION APPARATUS INCLUDING SAME

    公开(公告)号:US20230315673A1

    公开(公告)日:2023-10-05

    申请号:US18008387

    申请日:2020-06-11

    CPC classification number: G06F13/4247 G01R31/2601 G06F13/34

    Abstract: A distributed control system includes a tree topology network or a daisy-chain network including a communication parent station, communication child stations, and a plurality of communication paths among the communication parent station and the communication child stations, in which the communication parent station and the communication child stations include a scheduling unit that controls a transfer cycle that is temporal intervals of data transfer. The scheduling unit sets the transfer cycle that is the fastest out of a plurality of the data as a reference cycle, counts the number of times each time the reference cycle elapses, and imparts a value of the number of times to the reference cycle as a cycle number. When the cycle number reaches an optional number, the number of times is returned to an initial value, which makes one cycle of transfer control, and the transfer control is repeatedly executed. For the timing of the reference cycle at which the data is transferred, the scheduling unit defines a cycle number to which the reference cycle corresponds, on the basis of first information corresponding to the data.

    Distributed Control System and Communication Control Method Therefor

    公开(公告)号:US20210111924A1

    公开(公告)日:2021-04-15

    申请号:US16970585

    申请日:2019-01-15

    Abstract: In the present invention, device information is collected while real-time performance and high-speed performance of control-related normal communication are maintained. The distributed control system has: a central processing device; a central communication device; multiple terminal communication devices each having at least one controlled device connected thereto; an information storage device; and a network having a tree structure comprising multiple communication paths between the central communication device and the terminal communication devices, between the terminal communication devices, and between the terminal communication devices and the information storage device. The network is provided with a first communication path for connecting the upstream-side communication port of a terminal communication device with the downstream-side communication port of a terminal communication device and for connecting the upstream-side communication port of a terminal communication device with the normal communication port of the central communication device; and a second communication path for connecting between the downstream-side communication ports of terminal communication devices positioned at edges of the network and for connecting the downstream-side communication ports of the terminal communication devices with the device information communication port of the information storage device.

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