公开(公告)号：US20200279719A1

公开(公告)日：2020-09-03

申请号：US16876514

申请日：2020-05-18

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Kazuya YAMADA ,  Koichi YAMAMOTO ,  Naoki YASUI ,  Norihiko IKEDA ,  Isao MORI

IPC: H01J37/32 ,  H01L21/67

Abstract: According to one embodiment, a plasma processing apparatus includes a processing chamber, a sample stage that is disposed inside the processing chamber and electrically divided into a plurality of regions on which a sample is placed, an electromagnetic wave introduction unit that introduces electromagnetic waves into the processing chamber, and a bias power applying unit that applies bias power to the sample stage, in which the bias power applying unit is configured to include a first radio frequency power applying unit that applies first radio frequency power to a first region out of the plurality of electrically divided regions of the sample stage, a second radio frequency power applying unit that applies second radio frequency power to a second region out of the plurality of electrically divided regions of the sample stage, and a phase adjuster that controls the first radio frequency power applying unit and the second radio frequency power applying unit to shift the phases of the first radio frequency power and the second radio frequency power by a predetermined amount.

公开(公告)号：US20250138516A1

公开(公告)日：2025-05-01

申请号：US18692102

申请日：2022-12-23

Applicant: Hitachi High-Tech Corporation

Inventor： Tatsuya MARUYAMA ,  Junichi KITAMURA ,  Koichi YAMAMOTO ,  Yuji SUGAYA

IPC: G05B19/418 ,  H01J37/32

Abstract: A control communication system and a plasma processing apparatus for efficient utilization of a computer resource and a communication resource such as a storage area. A control communication system includes a control communication apparatus that includes a communication unit configured to transmit a packet including control data and in which the communication unit includes a plurality of ports, and a plurality of device groups that are communicably connected to the plurality of communication ports and are operated according to the received packet. The control data is generated toward a target communication port among the plurality of communication ports, the target communication port being determined based on information of a communication port that transmits the packet. The packet includes a packet data area in which the control data is arranged, and is transmitted from the target communication port to the device group connected to the target communication port.