公开(公告)号：US20220359153A1

公开(公告)日：2022-11-10

申请号：US17638695

申请日：2019-08-27

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroki KAWAMOTO ,  Keiji TAMURA ,  Toshie YAGUCHI

IPC: H01J37/28 ,  H01J37/073 ,  H01J37/244 ,  H01J37/22

Abstract: The invention is to simplify operations performed when imaging an electron diffraction pattern by using a transmission electron microscope. As a solution to the problem, a transmission electron microscope includes a detector to which an electron diffraction pattern is projected, a mask for zero-order wave configured to be inserted into and pulled out from between a sample and the detector, and a current detector configured to be inserted into and pulled out from a detection region of the zero-order waves in a state where the mask is inserted. An amount of current of electron beams emitted to the mask is measured in real time, and the measurement result is automatically reflected in settings of imaging conditions of an imaging camera provided in the transmission electron microscope.

公开(公告)号：US20220244201A1

公开(公告)日：2022-08-04

申请号：US17594658

申请日：2019-04-26

Applicant: Hitachi High-Tech Corporation

Inventor： Toshie YAGUCHI ,  Keiji TAMURA ,  Hiromi MISE ,  Yasuyuki NODERA ,  Akiko WAKUI ,  Keisuke IGARASHI

IPC: G01N23/2251 ,  H01J37/26 ,  H01J37/28 ,  H01J37/04

Abstract: Provided is a transmission electron microscope capable of obtaining a hollow-cone dark-field image and visually displaying irradiation conditions thereof. The transmission electron microscope is provided with an irradiation unit for irradiating a specimen with an electron beam, an objective lens for causing the electron beam transmitted through the specimen to form an image, beam deflectors for deflecting the electron beam, said beam deflectors being positioned higher than a position where the specimen is to be placed, an objective movable aperture for passing only a portion of the electron beam transmitted through the specimen, and a deflection coil control unit. The deflection coil control unit controls a deflection angle of the electron beam using the beam deflectors such that the specimen is irradiated with the electron beam at a predetermined angle with respect to an optical axis while the electron beam is moving in a precessional manner and such that only a diffracted wave and/or a scattered wave having a desired angle among diffracted waves and/or scattered waves generated when the electron beam is transmitted through the specimen passes through the objective movable aperture.