公开(公告)号：US4645176A

公开(公告)日：1987-02-24

申请号：US756105

申请日：1985-07-18

申请人： Hiroshi Ogawa ,  Yoshiteru Sonoda ,  Ryosuke Dohi

发明人： Hiroshi Ogawa ,  Yoshiteru Sonoda ,  Ryosuke Dohi

IPC分类号： F16K31/06

CPC分类号： F16K31/0655 ,  F16K31/06

摘要： A control valve comprising a vertical tubular yoke having a bottom wall, a solenoid mounted on the upper end of the yoke for giving a force of attraction the magnitude of which is in proportion to the value of input current, the solenoid having an operating rod directed downward and movable longitudinally thereof by the force of attraction, a valve body connected to the bottom wall of the yoke, a valve stem vertically movably supported by the valve body and having an upper portion extending upward from the valve body into the yoke, and conversion means housed in the yoke for converting the force of attraction acting on the operating rod to a displacement of the valve stem.

摘要翻译： 一种控制阀，包括具有底壁的垂直管状轭铁，安装在轭架上端的螺线管，用于提供其大小与输入电流值成比例的吸引力，螺线管具有指向的操作杆 通过吸引力向下并可纵向移动，连接到轭的底壁的阀体，由阀体可垂直移动地支撑并具有从阀体向上延伸到轭的上部的阀杆，以及转换 装在轭中的装置，用于将作用在操作杆上的吸引力转换成阀杆的位移。

公开(公告)号：US5981905A

公开(公告)日：1999-11-09

申请号：US865767

申请日：1997-05-30

申请人： Tadahiro Ohmi ,  Ryosuke Dohi ,  Eiji Ideta ,  Hiroyuki Fukuda ,  Hiroshi Morokoshi ,  Nobukazu Ikeda

发明人： Tadahiro Ohmi ,  Ryosuke Dohi ,  Eiji Ideta ,  Hiroyuki Fukuda ,  Hiroshi Morokoshi ,  Nobukazu Ikeda

IPC分类号： F16L13/02 ,  B23K9/095 ,  B23K31/12 ,  F16L1/00

CPC分类号： B23K9/0953 ,  B23K31/12 ,  B23K2201/06

摘要： A system of the invention for supervising piping work comprises a machine for performing piping work such as welding of pipes or tightening of pipe joints under predetermined conditions, check means for checking whether the piping work has been executed properly based on predetermined values of piping work conditions and actual piping work data, a host computer for accumulating the predetermined values of piping work conditions, the actual piping work data and the result of checking, and communication means for transmitting the predetermined values of piping work conditions, the actual piping work data and the result of checking.

公开(公告)号：US06116092A

公开(公告)日：2000-09-12

申请号：US919110

申请日：1997-08-28

申请人： Tadahiro Ohmi ,  Ryosuke Dohi ,  Koji Nishino ,  Nobukazu Ikeda

发明人： Tadahiro Ohmi ,  Ryosuke Dohi ,  Koji Nishino ,  Nobukazu Ikeda

IPC分类号： G01L9/04 ,  G01L9/00 ,  G01L19/00 ,  G01L19/06 ,  G01L7/08

CPC分类号： G01L19/0084 ,  G01L19/0645 ,  G01L19/143

摘要： A good quality passive-state film is formed on a gas-contact face of a diaphragm of a pressure detector using a sensor chip to prevent corrosion on, or water content emission from, or catalytic action at a gas-contact face, thereby improving production quality in a semiconductor manufacturing process and providing high accuracy pressure detection. The passive-state film is formed on the gas-contact face of the diaphragm when the diaphragm is mounted on a diaphragm base. The diaphragm base is then fixedly secured to a sensor base in which a sensor chip is housed and a pressure transmitting medium is sealed in a gap between the sensor base and the diaphragm base.

摘要翻译： 在使用传感器芯片的压力检测器的膜片的气体接触面上形成优质的被动状态膜，以防止气体接触面的腐蚀或水分含量的排出或催化作用，从而改善生产 质量在半导体制造过程和提供高精度的压力检测。 当隔膜安装在隔膜基座上时，被动态膜形成在隔膜的气体接触面上。 然后将隔膜基座牢固地固定到传感器基座上，在传感器基座中容纳传感器芯片，并且压力传递介质被密封在传感器基座和隔膜基座之间的间隙中。

公开(公告)号：US07059363B2

公开(公告)日：2006-06-13

申请号：US10495641

申请日：2003-01-20

申请人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryosuke Dohi ,  Toyomi Uenoyama

发明人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryosuke Dohi ,  Toyomi Uenoyama

IPC分类号： B65B1/04

CPC分类号： G05D7/0664 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A method for supplying a specified quantity Q of processing gas while dividing at a desired flow rate ratio Q1/Q2 accurately and quickly from a gas supply facility equipped with a flow controller into a chamber. When a specified quantity Q of gas is supplied while being divided at a desired flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller into a reduced pressure chamber C through a plurality of branch supply lines and shower plates fixed to the ends thereof, pressure type division quantity controllers FV1 and FV2 are provided in the plurality of branch supply lines GL1 and GL2. Opening control of both division quantity controllers FV1 and FV2 is started by an initial flow rate set signal from a division quantity control board FRC for fully opening the control valve CV of the pressure type division quantity controller having a higher flow rate and pressures P3′ and P3″ on the downstream side of the control valve CV are regulated thus supplying a total quantity Q=Q1+Q2 of gas while dividing into the chamber C through orifice holes (3a, 4a) made in shower plates (3, 4) at desired division quantities Q1 and Q2 represented by formulas Q1=C1P3′ and Q2=C2P3″ (where, C1 and C2 are constants dependent on the cross-sectional area of the orifice hole or the gas temperature on the upstream side thereof).

摘要翻译： 一种用于提供规定量的处理气体的方法，同时从装备有流量的气体供应设备精确而快速地分离所需流量比Q 1 / Q 2 2 控制器进入一个房间。 当从设置有流量控制器的气体供给设备以期望的流量比Q 1 / Q 2 2分配被指定量的气体供给时， 压力室C通过固定在其端部的多个分支供给管线和淋浴板，压力分离量控制器FV 1和FV 2 2设置在多个分支 供应线GL＆lt; 1＆gt;和GL＆gt; 2＆lt; 2＆gt ;. 通过来自分割量控制板FRC的初始流量设定信号开始两个分割量控制器FV 1和FV 2 2的打开控制，以完全打开控制阀CV 在控制阀CV的下游侧具有较高的流量和压力P 3 3和P 3 3“的压力型分配量控制器被调节，从而提供总计 数量Q = Q 1/2 + Q 2 2，同时通过在淋浴板（3,4）中制成的孔口（3a，4a）分成腔室C 由式Q 1表示的期望分割量Q 1和Q 2 2由下式表示：C 1＆lt; 1＆gt;＆lt; 3＆ /＆gt;和＆lt; 2＆gt; 2＆gt; 2＆lt; 3＆gt;＆lt; 3＆gt;（其中，C 1和C < SUB> 2 是取决于孔口的横截面积或其上游侧的气体温度的常数）。

公开(公告)号：US06394415B1

公开(公告)日：2002-05-28

申请号：US09627784

申请日：2000-07-27

申请人： Tadahiro Ohmi ,  Migaku Takahashi ,  Michio Yamaji ,  Tsuyoshi Tanikawa ,  Nobukazu Ikeda ,  Ryosuke Dohi ,  Kouji Nishino ,  Naofumi Yasumoto ,  Hiroyuki Fukuda ,  Tomio Uno ,  Yasuyuki Yanai

发明人： Tadahiro Ohmi ,  Migaku Takahashi ,  Michio Yamaji ,  Tsuyoshi Tanikawa ,  Nobukazu Ikeda ,  Ryosuke Dohi ,  Kouji Nishino ,  Naofumi Yasumoto ,  Hiroyuki Fukuda ,  Tomio Uno ,  Yasuyuki Yanai

IPC分类号： F16K3102

CPC分类号： F16K31/082 ,  F16K7/14 ,  F16K31/0655 ,  F16K31/0672 ,  Y10T137/8242

摘要： A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.

摘要翻译： 可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间，并且可以使得提供较少气体的流体供应/排出系统 在使用多个阀的情况下的逆流。 本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。 驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。 构件“a”由磁性材料制成，并且在其与轴之间具有空间。 平行于轴设置的线圈通过电磁感应使组件“a”上下移动，并利用弹簧力来封闭和打开阀座与阀座之间的一部分。

公开(公告)号：US5791369A

公开(公告)日：1998-08-11

申请号：US812330

申请日：1997-03-05

申请人： Koji Nishino ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Koji Kawada ,  Ryosuke Dohi ,  Hiroyuki Fukuda

发明人： Koji Nishino ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Koji Kawada ,  Ryosuke Dohi ,  Hiroyuki Fukuda

IPC分类号： F16K17/22 ,  F16K31/02 ,  G05D7/06 ,  G05D16/20 ,  H01L21/3065 ,  E03B11/00

CPC分类号： G05D7/0635 ,  Y10T137/5109 ,  Y10T137/7737 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/777 ,  Y10T137/87917

摘要： A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the upstream side of the orifice, a pressure detector (3) provided between the control valve and the orifice, and an operation control device (6) for calculating a flow rate Qc from the detected pressure P1 of the pressure detector as Qc=KP1 (K being a constant) and issuing a difference as a control signal Qy between a flow rate command signal Qs and the calculated flow rate Qc to a drive unit of the control valve. The orifice upstream side pressure P1 is adjusted by opening and closing the control valve, thereby controlling the orifice downstream side flow rate.

摘要翻译： 用于控制流体流量的压力型流量控制装置（1）将孔口的上游侧压力P1保持在下游侧压力P2的大约两倍。 除了孔口形成构件（5）之外，装置还包括设置在孔口上游侧的控制阀（2），设置在控制阀和孔之间的压力检测器（3）和操作控制装置 6），用于从Qc = KP1（K为常数）的压力检测器的检测压力P1计算流量Qc，并将差作为流量指令信号Qs与计算出的流量Qc之间的控制信号Qy发出， 控制阀的驱动单元。 通过打开和关闭控制阀来调节孔口上游侧压力P1，从而控制孔口下游侧流速。

公开(公告)号：US5669408A

公开(公告)日：1997-09-23

申请号：US661181

申请日：1996-06-10

申请人： Koji Nishino ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Koji Kawada ,  Ryosuke Dohi ,  Hiroyuki Fukuda

发明人： Koji Nishino ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Koji Kawada ,  Ryosuke Dohi ,  Hiroyuki Fukuda

IPC分类号： F16K17/22 ,  F16K31/02 ,  G05D7/06 ,  G05D16/20 ,  H01L21/3065 ,  F16K31/12

CPC分类号： G05D7/0635 ,  Y10T137/5109 ,  Y10T137/7737 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/777 ,  Y10T137/87917

摘要： A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the upstream side of the orifice, a pressure detector (3) provided between the control valve and the orifice, and an operation control device (6) for calculating a flow rate Qc from the detected pressure P1 of the pressure detector as Qc=KP1 (K being a constant) and issuing a difference as a control signal Qy between a flow rate command signal Qs and the calculated flow rate Qc to a drive unit of the control valve. The orifice upstream side pressure P1 is adjusted by opening and closing the control valve, thereby controlling the orifice downstream side flow rate.

摘要翻译： 用于控制流体流量的压力型流量控制装置（1）将孔口的上游侧压力P1保持在下游侧压力P2的大约两倍。 除了孔口形成构件（5）之外，装置还包括设置在孔口上游侧的控制阀（2），设置在控制阀和孔之间的压力检测器（3）和操作控制装置 6），用于从Qc = KP1（K为常数）的压力检测器的检测压力P1计算流量Qc，并将差作为流量指令信号Qs与计算出的流量Qc之间的控制信号Qy发出， 控制阀的驱动单元。 通过打开和关闭控制阀来调节孔口上游侧压力P1，从而控制孔口下游侧流速。

公开(公告)号：US08162286B2

公开(公告)日：2012-04-24

申请号：US12593580

申请日：2008-03-13

申请人： Yohei Sawada ,  Kaoru Hirata ,  Ryosuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Yohei Sawada ,  Kaoru Hirata ,  Ryosuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F16K31/02

CPC分类号： F16K31/007 ,  F16K7/14

摘要： Stable flow control is made possible even under high-temperature environments by relieving tensional force applied to a piezoelectric element when a piezoelectric actuator is retracted. Thus, a piezoelectric driven control valve includes: a body having a valve seat; a metal diaphragm to contact with and separate from the valve seat; an actuator box supported ascendably and descendably on the body; a split base fixed to the body; a disc spring pressing and urging the actuator box downward to bring the metal diaphragm into contact with the valve seat; and a piezoelectric actuator housed inside the actuator box and that extends upward with application of voltage to press the actuator box upward against the elastic force of the disc spring, and a precompression mechanism, for applying a compression force constantly to piezoelectric elements in the piezoelectric actuator, provided between the split base and the piezoelectric actuator.

摘要翻译： 即使在高温环境下，当压电致动器缩回时，通过减轻施加到压电元件的张力来实现稳定的流量控制。 因此，压电驱动控制阀包括：具有阀座的主体; 金属隔膜与阀座接触并分离; 一个致动器箱，可以上下方式支撑在主体上; 固定在身体上的分裂基座; 盘簧弹簧向下推动执行器箱，使金属隔膜与阀座接触; 以及压电致动器，其容纳在致动器箱内部并且通过施加电压向上延伸以克服盘簧的弹性力向上推动致动器盒;以及预压机构，用于将压缩力恒定地施加到压电致动器中的压电元件 ，设置在分离基座和压电致动器之间。

公开(公告)号：US06193212B1

公开(公告)日：2001-02-27

申请号：US09308922

申请日：1999-07-23

申请人： Tadahiro Ohmi ,  Migaku Takahashi ,  Michio Yamaji ,  Tsuyoshi Tanikawa ,  Nobukazu Ikeda ,  Ryosuke Dohi ,  Kouji Nishino ,  Naofumi Yasumoto ,  Hiroyuki Fukuda ,  Tomio Uno ,  Yasuyuki Yanai

发明人： Tadahiro Ohmi ,  Migaku Takahashi ,  Michio Yamaji ,  Tsuyoshi Tanikawa ,  Nobukazu Ikeda ,  Ryosuke Dohi ,  Kouji Nishino ,  Naofumi Yasumoto ,  Hiroyuki Fukuda ,  Tomio Uno ,  Yasuyuki Yanai

IPC分类号： F16K3102

CPC分类号： F16K31/082 ,  F16K7/14 ,  F16K31/0655 ,  F16K31/0672 ,  Y10T137/8242

摘要： A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.

摘要翻译： 可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间，并且可以使得提供较少气体的流体供应/排出系统 在使用多个阀的情况下的逆流。 本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。 驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。 构件“a”由磁性材料制成，并且在其与轴之间具有空间。 平行于轴设置的线圈通过电磁感应使组件“a”上下移动，并利用弹簧力来封闭和打开阀座与阀座之间的一部分。

公开(公告)号：US6018136A

公开(公告)日：2000-01-25

申请号：US315338

申请日：1999-05-20

申请人： Tadahiro Ohmi ,  Ryosuke Dohi ,  Eiji Ideta ,  Hiroyuki Fukuda ,  Hiroshi Morokoshi ,  Nobukazu Ikeda

发明人： Tadahiro Ohmi ,  Ryosuke Dohi ,  Eiji Ideta ,  Hiroyuki Fukuda ,  Hiroshi Morokoshi ,  Nobukazu Ikeda

IPC分类号： F16L13/02 ,  B23K9/095 ,  B23K31/12 ,  F16L1/00

CPC分类号： B23K9/0953 ,  B23K31/12 ,  B23K2201/06

摘要： A system of the invention for supervising piping work comprises a machine for performing piping work such as welding of pipes or tightening of pipe joints under predetermined conditions, check means for checking whether the piping work has been executed properly based on predetermined values of piping work conditions and actual piping work data, a host computer for accumulating the predetermined values of piping work conditions, the actual piping work data and the result of checking, and communication means for transmitting the predetermined values of piping work conditions, the actual piping work data and the result of checking.

摘要翻译： 用于监督管道工作的本发明的系统包括用于在预定条件下执行管道焊接或管接头的管道工作的机器，用于根据管道工作条件的预定值检查管道工作是否已被正确执行的检查装置 实际管道工作数据，用于累积管道工作条件的预定值的主计算机，实际管道工作数据和检查结果，以及用于发送管道工作条件的预定值的通信装置，实际管道工作数据和 检查结果。