-
公开(公告)号：US07012263B2
公开(公告)日：2006-03-14
申请号：US10866511
申请日：2004-06-11
申请人： Hirohiko Murata , Masateru Sato
发明人： Hirohiko Murata , Masateru Sato
IPC分类号： H01J27/00
CPC分类号： H01J27/08 , H01J37/08 , H01J2237/31701
摘要： The ion source apparatus of the present invention includes at least one pair of antenna-opposed magnets sandwiching an antenna element and moveable to magnetic element and the antenna element both in horizontal and vertical directions in a plasma chamber, and a control means performing a positional adjustment over the antenna-opposed magnets to the antenna element in the plasma chamber. An electrons-generated region of high-concentration is formed around the antenna element through electric fields based on outputs of the antenna element and magnetic fields of the antenna-opposed magnets crossing the antenna element.
摘要翻译： 本发明的离子源装置包括在等离子体室中夹持天线元件并且能够在水平和垂直方向上移动到磁性元件和天线元件的至少一对天线相对的磁体，以及执行位置调整的控制装置 在与等离子体室中的天线元件的天线相对的磁体上。 基于天线元件的输出和穿过天线元件的天线相对的磁体的磁场，通过电场在天线元件周围形成高浓度的电子产生区域。
-
公开(公告)号：US20050016838A1
公开(公告)日：2005-01-27
申请号：US10861758
申请日：2004-06-04
申请人： Hirohiko Murata , Masateru Sato
发明人： Hirohiko Murata , Masateru Sato
CPC分类号： H01J27/16 , H01J37/08 , H01J2209/017 , H01J2237/022
摘要： An ion source apparatus includes a rare gas supply source supplying rare gas instead of ion source gas to a plasma chamber, means to determine time and timing for cleaning electrodes in consideration of a collecting amount of insulation layers accreting to the electrodes of an extraction electrode system. Based on the above, the ion source apparatus removes the insulation layers by sputtering with ion beam of the rare gas while adjusting extraction or accelerate voltage and supply amount of the rare gas as a setting parameter. Moreover, by adjusting the setting parameter which changes a diameter of ion beam based on the rare gas when the ion beam collides onto each electrode surface of the extraction electrode system, the beam diameter is focused within an effective range in which intension of the sputtering of the insulation layers is maximized thus evenly removing the insulation layers.
摘要翻译： 离子源装置包括：将等离子体气体供给稀有气体而不是离子源气体的稀有气体供给源，考虑到提取电极系统的电极的绝缘层的收集量，确定清洗电极的时间和时间的装置 。 基于上述，离子源装置通过溅射稀土气体的离子束，同时调整提取或加速稀有气体的电压和供给量作为设定参数，来除去绝缘层。 此外，通过调整当离子束碰撞到提取电极系统的每个电极表面时基于稀有气体改变离子束直径的设定参数，光束直径聚焦在有效范围内，其中溅射的强度 绝缘层最大化，从而均匀地去除绝缘层。
-
公开(公告)号：US07947129B2
公开(公告)日：2011-05-24
申请号：US10861758
申请日：2004-06-04
申请人： Hirohiko Murata , Masateru Sato
发明人： Hirohiko Murata , Masateru Sato
IPC分类号： C25F3/00
CPC分类号： H01J27/16 , H01J37/08 , H01J2209/017 , H01J2237/022
摘要： An ion source apparatus includes a rare gas supply source supplying rare gas instead of ion source gas to a plasma chamber, means to determine time and timing for cleaning electrodes in consideration of a collecting amount of insulation layers accreting to the electrodes of an extraction electrode system. Based on the above, the ion source apparatus removes the insulation layers by sputtering with ion beam of the rare gas while adjusting extraction or accelerate voltage and supply amount of the rare gas as a setting parameter. Moreover, by adjusting the setting parameter which changes a diameter of ion beam based on the rare gas when the ion beam collides onto each electrode surface of the extraction electrode system, the beam diameter is focused within an effective range in which intension of the sputtering of the insulation layers is maximized thus evenly removing the insulation layers.
摘要翻译： 离子源装置包括：将等离子体气体供给稀有气体而不是离子源气体的稀有气体供给源，考虑到提取电极系统的电极的绝缘层的收集量，确定清洗电极的时间和时间的装置 。 基于上述，离子源装置通过溅射稀土气体的离子束，同时调整提取或加速稀有气体的电压和供给量作为设定参数，来除去绝缘层。 此外，通过调整当离子束碰撞到提取电极系统的每个电极表面时基于稀有气体改变离子束直径的设定参数，光束直径聚焦在有效范围内，其中溅射的强度 绝缘层最大化，从而均匀地去除绝缘层。
-
4.发明授权Ion beam mass separation filter, mass separation method thereof and ion source using the same 失效离子束质量分离过滤器，其质量分离方法和使用其的离子源公开(公告)号：US06803590B2
公开(公告)日：2004-10-12
申请号：US10379065
申请日：2003-03-04
申请人： Adam Brailove , Hirohiko Murata
发明人： Adam Brailove , Hirohiko Murata
IPC分类号： H11J4900
CPC分类号： H01J49/284
摘要： A mass separation filter has a first magnet forming a first magnetic field in an orthogonal direction to a beam axis of an ion beam, a second magnet sequentially arranged with the first magnet along the beam axis, parallel with and facing the opposite direction of the first magnet, and forming a second magnetic field orthogonal to the beam axis; and a collimator wall formed within the first and second magnetic fields that forms a transfer channel from a first curved channel deflected from the first magnetic field to a second curved channel deflected by the second magnetic field in a direction the reverse of the first magnetic field. Incident ions pass through a channel inversely curved by the magnetic fields of the first and second magnets according to the mass separation filter, and it is possible to lead ions of a desired mass in the same direction as the beam axis.
摘要翻译： 质量分离过滤器具有形成与离子束的束轴正交的第一磁场的第一磁体，沿着光束轴线与第一磁体顺序排列的第二磁体，与第一磁体平行并面向第一磁体的相反方向 并形成与光束轴正交的第二磁场; 以及形成在第一和第二磁场内的准直器壁，其形成从第一磁场偏转的第一弯曲通道到由第二磁场偏转的第二弯曲通道在与第一磁场相反的方向上的转移通道。 事件离子通过根据质量分离过滤器由第一和第二磁体的磁场反向弯曲的通道，并且可以将所需质量的离子导引在与光束轴线相同的方向上。
-
公开(公告)号：US5237260A
公开(公告)日：1993-08-17
申请号：US791181
申请日：1991-11-13
摘要： An engine-operated generator system utilizes the switching elements of an inverter transformation circuit to accomplish starting. The starter circuit includes a battery, one electrode of which is connected to one terminal of a smoothing capacitor connected between the DC terminals of the inverter transformation circuit in such a manner that the electrode and the terminal are of the same polarity. The other electrode is connected to one of the output terminals of an AC generator system through a switch which is closed to start the engine, and which is connected to a reactor forming an LC circuit. In starting the engine, the rectifier circuit is driven in an inverter transformation mode, one of the switching elements in the inverter transformation circuit which is connected between the reactor and the one terminal of the smoothing capacitor being driven in a chopper mode. The inverter transformation circuit is formed by bridge-connecting switching elements each having a flywheel diode. The same starting circuit may be used in connection with a DC generator, with or without the inclusion of a smoothing capacitor at the output of the DC generator.
-
公开(公告)号：US06206180B1
公开(公告)日：2001-03-27
申请号：US09162432
申请日：1998-09-28
申请人： Toshiro Sekine , Eiji Ohki , Masanobu Tomita , Hirohiko Murata , Kazumichi Kato , Yasushi Muragishi , Tetsuyuki Kimura
发明人： Toshiro Sekine , Eiji Ohki , Masanobu Tomita , Hirohiko Murata , Kazumichi Kato , Yasushi Muragishi , Tetsuyuki Kimura
IPC分类号： B65G2702
摘要： In a vibratory parts-feeder including; a feeder bowl in which a spiral track is formed, a vertical exciter with first electro-magnetic coil for exciting the feeder bowl in the vertical direction, a horizontal exciter with second electro-magnetic coil for exciting the feeder bowl in the horizontal direction, horizontal leaf springs for supporting the feeder bowl so as to be vibratile in the vertical direction, and vertical leaf springs for supporting the feeder bowl so as to be vibratile in the horizontal direction, wherein there is a phase difference between the currents flowing through the first and second electro-magnetic coils and the feeder bowl is elliptically vibrated, the improvements in which a phase adjusting circuit is connected to the first or second electro-magnetic coil, voltage adjusting circuits are connected to the first and second electro-magnetic coils and the ratio of the longer axis to the shorter axis of the elliptical vibration and the inclination of the longer axis thereof are varied with the adjustment of the phase adjusting circuit and the voltage adjusting circuits.
摘要翻译： 在振动部件给料机中包括 其中形成有螺旋轨道的进料碗，具有用于在垂直方向上激励供料碗的第一电磁线圈的垂直激励器，具有用于在水平方向上激励供料碗的水平激励器，水平方向 用于支撑进料碗以便在垂直方向上振动的板簧，以及用于支撑进料碗以在水平方向上振动的垂直叶片弹簧，其中流过第一和第二和第 第二电磁线圈和馈线碗椭圆振动，其中相位调整电路连接到第一或第二电磁线圈的改进，电压调节电路连接到第一和第二电磁线圈，并且比率 的长轴到椭圆振动的较短轴线，并且其长轴的倾斜度随着调节而变化 nt的相位调整电路和电压调节电路。
-
-
-
-
-
搜索结果
6 条记录 (耗时 0.014 秒)
