公开(公告)号：US08941903B2

公开(公告)日：2015-01-27

申请号：US13918225

申请日：2013-06-14

Applicant: Hamamatsu Photonics K.K.

Inventor： Yuu Takiguchi ,  Naoya Matsumoto ,  Norihiro Fukuchi ,  Takashi Inoue ,  Tamiki Takemori ,  Naohisa Mukozaka

IPC: G03H1/08 ,  H01S3/00 ,  B23K26/00 ,  B23K26/06 ,  G02B5/32 ,  G03H1/00 ,  G02B3/08 ,  G02B13/22 ,  G03H1/22

CPC classification number: H01S3/0085 ,  B23K26/06 ,  B23K26/352 ,  G02B3/08 ,  G02B5/32 ,  G02B13/22 ,  G03H1/0005 ,  G03H1/08 ,  G03H1/0808 ,  G03H1/2294 ,  G03H2001/0094 ,  G03H2225/32

Abstract: A laser processing apparatus including a laser light source, a phase modulation type spatial light modulator, a driving unit, a control unit, and an imaging optical system. A storage unit that is included in the driving unit stores a plurality of basic holograms corresponding to a plurality of basic processing patterns and a focusing hologram corresponding to a Fresnel lens pattern. The control unit arranges in parallel two or more basic holograms selected from the plurality of basic holograms stored in the storage unit, overlaps the focusing hologram with each of the basic holograms arranged in parallel to form the whole hologram, and presents the formed whole hologram to the spatial light modulator.

Abstract translation: 一种激光加工装置，包括激光光源，相位调制型空间光调制器，驱动单元，控制单元和成像光学系统。 包括在驱动单元中的存储单元存储对应于多个基本处理模式的多个基本全息图和对应于菲涅尔透镜图案的聚焦全息图。 控制单元平行布置从存储在存储单元中的多个基本全息图中选择的两个或多个基本全息图，与聚焦全息图重叠，每个基本全息图平行布置以形成整个全息图，并将形成的全息图呈现为 空间光调制器。