公开(公告)号：US20170018417A1

公开(公告)日：2017-01-19

申请号：US15301218

申请日：2015-03-27

Applicant: HORIBA JOBIN YVON SAS

Inventor： Patrick CHAPON ,  Agnes TEMPEZ ,  Sebastien LEGENDRE

IPC: H01J49/10 ,  H01J49/00 ,  H01J49/40 ,  H01J49/24

CPC classification number: H01J49/105 ,  H01J49/0031 ,  H01J49/24 ,  H01J49/40

Abstract: A system and a process for measuring, by glow discharge spectrometry, the elemental and/or molecular chemical composition of an organic solid sample (10). The sample (10) is positioned so as to seal a glow discharge plasma reactor (2), a gaseous mixture including at least one inert gas and gaseous oxygen is injected into the reactor (2), the concentration of gaseous oxygen being between 0.1% and 15% by weight of the gaseous mixture, an electric discharge of radiofrequency type is applied to the electrodes of the plasma reactor (2) in order to generate a glow discharge plasma, and the solid sample (10) is exposed to the plasma so as to etch an erosion crater in the solid sample (10); at least one signal representative of an ionized species of negative charge is selected and measured using a mass spectrometer (4).

Abstract translation: 通过辉光放电光谱测定有机固体样品（10）的元素和/或分子化学组成的系统和方法。 定位样品（10）以密封辉光放电等离子体反应器（2），将包含至少一种惰性气体和气态氧的气体混合物注入反应器（2）中，气态氧浓度在0.1％ 和15重量％的气体混合物，为了产生辉光放电等离子体，将等离子体反应器（2）的电极施加射频型放电，并将固体样品（10）暴露于等离子体 蚀刻固体样品（10）中的侵蚀坑; 使用质谱仪（4）选择和测量代表负电荷的离子化物质的至少一个信号。