ANALYZING APPARATUS AND ANALYZING METHOD
    3.
    发明申请

    公开(公告)号:US20170205336A1

    公开(公告)日:2017-07-20

    申请号:US15406932

    申请日:2017-01-16

    申请人: HORIBA, LTD.

    发明人: Takuya IDO

    IPC分类号: G01N21/27

    摘要: To check an influence to an absorbance due to a temporal variation of measuring light in an analyzing apparatus, the analyzing apparatus includes a reference gas filling space, a spectrum generating portion, and a spectrum comparing portion. The reference gas filling space is formed on an optical path of measuring light and is filled with a reference gas different from a measurement target gas at a first concentration. The spectrum generating portion generates measured spectrum data, associating a wavelength of a detection light beam as the measuring light after passing through the reference gas filling space with a relative intensity of the detection light beam. The spectrum comparing portion calculates a difference between the measured spectrum data and reference absorption spectrum data obtained by measuring in advance an absorption spectrum of the reference gas at the first concentration by a direct absorption method.