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公开(公告)号：US20150221471A1
公开(公告)日：2015-08-06
申请号：US14613538
申请日：2015-02-04
发明人： Michio HATANO , Yusuke ABE , Zhigang WANG
CPC分类号： H01J37/222 , H01J37/28 , H01J2237/2448 , H01J2237/24495
摘要： In observation of a sample having a structure in its depth direction, a charged particle beam apparatus that can form an SEM image reflecting a sample shape at a desired depth by a single image acquisition while avoiding enlargement of the apparatus is provided. The apparatus has: an irradiation optical system for irradiating and scanning a charged particle beam generated from a charged particle source on the sample; a detection optical system having a detector that detects charged particles generated from the sample by the irradiation of the charged particle beam, and converts them into an electric signal at a predetermined sampling period; and an image processing unit for forming an image based on the electric signal from the detector, in which the image processing unit detects a peak of wave height values for each pixel from the electric signal at each sampling time, and forms the image based on the peak of the detected wave height values.
摘要翻译： 在观察具有其深度方向结构的样品时，提供了一种带电粒子束装置，其能够通过单次图像获取反映所需深度的样品形状，同时避免该装置的放大。 该装置具有：照射光学系统，用于对从样品上的带电粒子源产生的带电粒子束进行照射和扫描; 检测光学系统，具有检测器，其通过照射带电粒子束来检测从样品产生的带电粒子，并以预定的采样周期将其转换为电信号; 以及图像处理单元，用于基于来自检测器的电信号形成图像，其中图像处理单元在每个采样时间从电信号检测每个像素的波高值的峰值，并且基于 检测到的波高值的峰值。
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公开(公告)号：US20170092462A1
公开(公告)日：2017-03-30
申请号：US15273523
申请日：2016-09-22
发明人： Michio HATANO , Yoshinori NAKAYAMA , Masaru MATSUZAKI , Hiroki KAWADA , Yoshinori MOMONOI , Zhigang WANG
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/24592 , H01J2237/2826
摘要： Provided is a measurement device including: an irradiation optical system which emits a primary charged quantum beam to a sample for scanning; a detector which detects secondary charged particles generated from the sample; and a signal processing unit which processes an output signal from the secondary charged particle detector which has detected the secondary charged particles, in which the signal processing unit includes a measurement unit which measures widths of a first pattern group calibrated with a well-known first dimension and a second pattern group calibrated with a well-known second dimension, and an operation unit which defines a relationship between the well-known dimensions of the first and second pattern groups and length measurement values of the first and second pattern groups as a function. Accordingly, it is possible to control device performance with high accuracy, by controlling a device state so that the measured value described above is within an acceptable range by comparing to a predetermined value provided in advance.
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公开(公告)号：US20130343649A1
公开(公告)日：2013-12-26
申请号：US13791469
申请日：2013-03-08
发明人： Hideki ITAI , Zhigang WANG , Kazunari ASAO
IPC分类号： G06K9/46
CPC分类号： G06K9/4647 , G01N23/2254 , G01N2223/42 , G06T5/007 , G06T2207/10061
摘要： In order to solve the problem that the resolution of a back-scattered electron image without a contrast difference between materials with close atomic numbers is low, an image processing apparatus that performs an image process on a back-scattered electron image as an input image includes: a material peak detection unit that determines a peak luminance value with a peak of a frequency of a luminance histogram based on a luminance value obtained for each measurement position by using the input image as an input and information about material-dependent back-scattered electron generation efficiency, and that outputs the peak luminance value for each material; and an image information adjustment unit that emphasizes a material-dependent contrast on the basis of the input image and the peak luminance value for each material.
摘要翻译： 为了解决在近原子序号的材料之间没有对比度差异的背散射电子图像的分辨率低的问题，对作为输入图像的背散射电子图像进行图像处理的图像处理装置包括 ：材料峰值检测单元，其基于通过使用输入图像作为输入而获得的针对每个测量位置的亮度值来确定具有亮度直方图的频率的峰值的峰值亮度值以及关于材料依赖的反向散射电子的信息 产生效率，并输出每种材料的峰值亮度值; 以及图像信息调整单元，其基于输入图像和每种材料的峰值亮度值强调与材料相关的对比度。
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