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公开(公告)号：US20170092462A1
公开(公告)日：2017-03-30
申请号：US15273523
申请日：2016-09-22
发明人： Michio HATANO , Yoshinori NAKAYAMA , Masaru MATSUZAKI , Hiroki KAWADA , Yoshinori MOMONOI , Zhigang WANG
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/24592 , H01J2237/2826
摘要： Provided is a measurement device including: an irradiation optical system which emits a primary charged quantum beam to a sample for scanning; a detector which detects secondary charged particles generated from the sample; and a signal processing unit which processes an output signal from the secondary charged particle detector which has detected the secondary charged particles, in which the signal processing unit includes a measurement unit which measures widths of a first pattern group calibrated with a well-known first dimension and a second pattern group calibrated with a well-known second dimension, and an operation unit which defines a relationship between the well-known dimensions of the first and second pattern groups and length measurement values of the first and second pattern groups as a function. Accordingly, it is possible to control device performance with high accuracy, by controlling a device state so that the measured value described above is within an acceptable range by comparing to a predetermined value provided in advance.
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公开(公告)号：US20150221471A1
公开(公告)日：2015-08-06
申请号：US14613538
申请日：2015-02-04
发明人： Michio HATANO , Yusuke ABE , Zhigang WANG
CPC分类号： H01J37/222 , H01J37/28 , H01J2237/2448 , H01J2237/24495
摘要： In observation of a sample having a structure in its depth direction, a charged particle beam apparatus that can form an SEM image reflecting a sample shape at a desired depth by a single image acquisition while avoiding enlargement of the apparatus is provided. The apparatus has: an irradiation optical system for irradiating and scanning a charged particle beam generated from a charged particle source on the sample; a detection optical system having a detector that detects charged particles generated from the sample by the irradiation of the charged particle beam, and converts them into an electric signal at a predetermined sampling period; and an image processing unit for forming an image based on the electric signal from the detector, in which the image processing unit detects a peak of wave height values for each pixel from the electric signal at each sampling time, and forms the image based on the peak of the detected wave height values.
摘要翻译： 在观察具有其深度方向结构的样品时，提供了一种带电粒子束装置，其能够通过单次图像获取反映所需深度的样品形状，同时避免该装置的放大。 该装置具有：照射光学系统，用于对从样品上的带电粒子源产生的带电粒子束进行照射和扫描; 检测光学系统，具有检测器，其通过照射带电粒子束来检测从样品产生的带电粒子，并以预定的采样周期将其转换为电信号; 以及图像处理单元，用于基于来自检测器的电信号形成图像，其中图像处理单元在每个采样时间从电信号检测每个像素的波高值的峰值，并且基于 检测到的波高值的峰值。
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