公开(公告)号：US20150277237A1

公开(公告)日：2015-10-01

申请号：US14441768

申请日：2013-11-14

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Takumichi Sutani ,  Miki Isawa ,  Shunsuke Koshihara ,  Akiyuki Sugiyama

IPC: G03F7/20

CPC classification number: G03F7/70491 ,  B82Y40/00 ,  H01L21/0337

Abstract: An image processor, a method for generating a pattern using self-organizing lithographic techniques, and a computer program are provided to achieve image processing suitable for addressing a sample generated by patterning using Directed Self-Assembly (DSA), and the processor, method, and computer program are characterized in that a template for addressing is prepared on the basis of guide pattern data used for patterning by DSA. The above configuration makes it possible to provide an addressing pattern suitable for visual field positioning in measuring or inspecting a pattern formed through the patterning process using DSA.

Abstract translation: 提供图像处理器，使用自组织光刻技术产生图案的方法和计算机程序，以实现适合于寻址通过使用定向自组装（DSA）的图案生成的样本的图像处理，以及处理器， 和计算机程序的特征在于，基于用于通过DSA进行图案化的引导图案数据来准备用于寻址的模板。 上述配置使得可以提供适于视场定位的寻址图案，以测量或检查通过使用DSA的图案化工艺形成的图案。

公开(公告)号：US10732512B2

公开(公告)日：2020-08-04

申请号：US15903536

申请日：2018-02-23

Applicant: Hitachi High-Technologies Corporation

Inventor： Takumichi Sutani ,  Miki Isawa ,  Shunsuke Koshihara ,  Akiyuki Sugiyama

IPC: G06K9/00 ,  G03F7/20 ,  B82Y40/00 ,  H01L21/033

Abstract: An image processor, a method for generating a pattern using self-organizing lithographic techniques, and a computer program are provided to achieve image processing suitable for addressing a sample generated by patterning using Directed Self-Assembly (DSA), and the processor, method, and computer program are characterized in that a template for addressing is prepared on the basis of guide pattern data used for patterning by DSA. The above configuration makes it possible to provide an addressing pattern suitable for visual field positioning in measuring or inspecting a pattern formed through the patterning process using DSA.