Invention Grant
- Patent Title: Image processor, method for generating pattern using self-organizing lithographic techniques and computer program
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Application No.: US15903536Application Date: 2018-02-23
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Publication No.: US10732512B2Publication Date: 2020-08-04
- Inventor: Takumichi Sutani , Miki Isawa , Shunsuke Koshihara , Akiyuki Sugiyama
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Tech Corporation
- Current Assignee: Hitachi High-Tech Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3fa3d28f
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G03F7/20 ; B82Y40/00 ; H01L21/033

Abstract:
An image processor, a method for generating a pattern using self-organizing lithographic techniques, and a computer program are provided to achieve image processing suitable for addressing a sample generated by patterning using Directed Self-Assembly (DSA), and the processor, method, and computer program are characterized in that a template for addressing is prepared on the basis of guide pattern data used for patterning by DSA. The above configuration makes it possible to provide an addressing pattern suitable for visual field positioning in measuring or inspecting a pattern formed through the patterning process using DSA.
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