公开(公告)号：US09824854B2

公开(公告)日：2017-11-21

申请号：US15109481

申请日：2014-12-24

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yusuke Ominami ,  Junichi Katane ,  Shinsuke Kawanishi ,  Sukehiro Ito

IPC: G01N23/00 ,  H01J37/28 ,  H01J37/244 ,  H01J37/18 ,  H01J37/22

CPC classification number: H01J37/28 ,  H01J37/18 ,  H01J37/226 ,  H01J37/244 ,  H01J2237/24455 ,  H01J2237/2448 ,  H01J2237/2608

Abstract: Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal (512) associated with light emitted from a light-emitting member (500) that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample (6). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal (518) caused by reflected charged particles or secondary charged particles (517) from the sample (6).

公开(公告)号：US08692195B2

公开(公告)日：2014-04-08

申请号：US13633476

申请日：2012-10-02

Applicant: Hitachi High-Technologies Corporation

Inventor： Sukehiro Ito ,  Junichi Katane

IPC: H01J37/28 ,  H01J37/26 ,  G01N23/225

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2605

Abstract: The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image. In addition, the detector is made usable in combination with a detector for high vacuum, to thereby make it possible to provide wide-ranging users with the image, irrespective of the vacuum mode.

Abstract translation: 本发明提供一种扫描带电粒子束装置，其包括样品室（8）和检测器。 检测器具有：检测至少从真空紫外区域到可见光区域的光的功能，具有通过气体闪烁的发光现象获得的图像信息的光（17），当样品室被控制到 低真空（1Pa〜3,000Pa）; 以及检测具有通过电子和气体分子的级联放大获得的图像信息的离子电流（11,13）的功能。 因此，可以实现可以处理各种样品的观察的装置。 此外，设计了检测单元的最佳配置，从而使得可以向所获得的图像增加值并且向用户提供具有观察图像的广泛范围的用户。 此外，检测器可与用于高真空的检测器组合使用，从而使得可以向广泛的用户提供图像，而不管真空模式如何。

公开(公告)号：US11640897B2

公开(公告)日：2023-05-02

申请号：US16641870

申请日：2017-09-04

Applicant: Hitachi High-Technologies Corporation

Inventor： Ryo Hirano ,  Tsunenori Nomaguchi ,  Chisato Kamiya ,  Junichi Katane

IPC: H01J37/28 ,  H01J37/141 ,  H01J37/20 ,  H01J37/244

Abstract: The present invention provides a charged particle beam apparatus capable of efficiently reducing the effect of a residual magnetic field when SEM observation is performed. The charged particle beam apparatus according to the present invention includes a first mode for passing a direct current to a second coil after turning off a first coil, and a second mode for passing an alternating current to the second coil after turning off the first coil.

公开(公告)号：US11430630B2

公开(公告)日：2022-08-30

申请号：US16641035

申请日：2017-09-04

Applicant: Hitachi High-Technologies Corporation

Inventor： Ryo Hirano ,  Tsunenori Nomaguchi ,  Chisato Kamiya ,  Junichi Katane

IPC: H01J37/28 ,  H01J37/141 ,  H01J37/20 ,  H01J37/30

Abstract: The present invention realizes a composite charged particle beam apparatus capable of suppressing a leakage magnetic field from a pole piece forming an objective lens of an SEM with a simple structure. The charged particle beam apparatus according to the present invention obtains an ion beam observation image while passing a current to a first coil constituting the objective lens, and performs an operation of reducing the image shift by passing a current to a second coil with a plurality of current values, and determines a current to be passed to the second coil based on a difference between the operations.