公开(公告)号：US10134564B2

公开(公告)日：2018-11-20

申请号：US15527562

申请日：2015-11-26

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Taiga Okumura ,  Takashi Ohshima ,  Yuusuke Oominami ,  Minami Shouji ,  Akiko Hisada ,  Akio Yoneyama

IPC: H01J37/244 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28

Abstract: Provided is a charged particle beam device including a charged particle optical column that irradiates a specimen with a primary charged particle beam, and a specimen base rotating unit that is capable of rotating the specimen base in a state of an angle formed by a surface of the specimen base and an optical axis of the primary charged particle beam being inclined to a non-perpendicular angle, in which the specimen base is configured to include a detecting element that detects a charged particle scattered or transmitted inside the specimen, and transmitted charged particle images of the specimen corresponding to each angle is acquired by irradiating the specimen in a state of the specimen base rotating unit being rotated at a plurality of different angles.

公开(公告)号：US10431416B2

公开(公告)日：2019-10-01

申请号：US15753685

申请日：2015-08-21

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yusuke Ominami ,  Akiko Hisada

IPC: H01J37/16 ,  H01J37/20 ,  H01J37/28 ,  H01J37/244

Abstract: In order to observe a water-containing sample with excellent convenience under an air atmosphere or a gas atmosphere, or under a desired pressure, in the present invention, there is provided an observation support unit for observation by irradiating the sample disposed in a non-vacuum space separated by a diaphragm from an inner space of a charged particle optical lens barrel that generates a charged particle beam, with the charged particle beam. The observation support unit includes a main body portion for covering a hole portion that forms an observation region where the sample is observed, and the sample, and the observation support unit is directly mounted between the sample and the diaphragm, that is, on the sample.