公开(公告)号：US20180067294A1

公开(公告)日：2018-03-08

申请号：US15692418

申请日：2017-08-31

Applicant: HITACHI, LTD.

Inventor： Ryoko ARAKI ,  Hyejin KIM ,  Daisuke BIZEN

IPC: G02B21/00 ,  G01B9/04

CPC classification number: G02B21/008 ,  G01B9/04 ,  G02B21/0016 ,  G02B21/0032 ,  G02B21/0036 ,  G02B21/0052 ,  H01J37/263 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/244 ,  H01J2237/2485

Abstract: A scanning microscope includes: a charged particle beam source configured to output a charged particle beam to be emitted to a sample; a detector configured to detect charged particles from the sample; and a controller configured to control the charged particle beam source and the detector, wherein the controller changes one or more variable parameters to determine a plurality of different parameter value sets, acquires a measurement result of a temporal change of absorption current in a target sample material under each of the plurality of different parameter value sets, and, based on the measurement results, selects a parameter value set for use in measurement of the target sample from the plurality of different parameter value sets.