OPTICAL UNIT AND FILM THICKNESS MEASUREMENT DEVICE

    公开(公告)号:US20220333913A1

    公开(公告)日:2022-10-20

    申请号:US17634298

    申请日:2020-08-31

    Abstract: An optical unit includes an input portion configured to have measurement light having a wavelength extending from an ultraviolet region to a visible region input thereto, an optical system configured to condense the measurement light in a state where a chromatic aberration is caused to occur, and an opening portion configured not to image light having a wavelength in the visible region and to image light having a wavelength in the ultraviolet region of the measurement light having a chromatic aberration having occurred therein.

    IMAGE ACQUISITION DEVICE AND IMAGE ACQUISITION METHOD

    公开(公告)号:US20210080711A1

    公开(公告)日:2021-03-18

    申请号:US16772983

    申请日:2018-11-06

    Inventor: Satoshi TAKIMOTO

    Abstract: An image acquisition device includes: a stage on which a sample is placed; a drive unit; a first irradiation optical system; a second irradiation optical system; a beam splitter; a pupil dividing element; a first imaging lens; a first imaging element; an analysis unit; a control unit; a second imaging lens; and a second imaging element, a first irradiation light irradiation range captured by the first irradiation optical system includes a second imaging region captured by the second imaging element, the second imaging region is located behind a first imaging region in a scanning direction, and the control unit controls a focus position of an objective lens based on focus information before capturing the second imaging region by the second imaging element.

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