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公开(公告)号：US10955760B2
公开(公告)日：2021-03-23
申请号：US16812831
申请日：2020-03-09
Applicant: Gigaphoton Inc.
Inventor： Masaki Nakano , Yutaka Shiraishi
Abstract: An extreme ultraviolet light generation device includes: a target supply unit including a nozzle through which a target substance in a liquid form is output into a chamber; a piezoelectric element configured to vibrate the nozzle under a droplet connection condition to regularly generate a droplet of the target substance; and a control unit configured to perform search processing of changing a drive condition of the piezoelectric element to search for a drive condition of the piezoelectric element corresponding to the droplet connection condition and configured to set a drive condition of the piezoelectric element used for generation of extreme ultraviolet light based on a result of the search processing. The control unit preliminarily drives the piezoelectric element before performing the search processing and starts the search processing after performing the preliminary drive.
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2.发明授权公开(公告)号：US09198272B2
公开(公告)日：2015-11-24
申请号：US14215527
申请日：2014-03-17
Applicant: GIGAPHOTON INC.
Inventor： Masaki Nakano , Osamu Wakabayashi
CPC classification number: H05G2/006 , B05B9/002 , B05B12/02 , B05B17/0607 , B05B17/0615 , G03F7/70033 , G03F7/70041 , G03F7/7085 , H01L21/268 , H01L22/10 , H05G2/003 , H05G2/008
Abstract: A target supply device may include a reservoir configured to hold a target material in its interior in liquid form, a vibrating element configured to apply vibrations to the reservoir, a target sensor configured to detect droplets of the target material outputted from the reservoir, a control unit configured to set parameters based on a result of the detection performed by the target sensor, a function generator configured to generate an electrical signal having a waveform based on the parameters, and a power source configured to apply a driving voltage to the vibrating element in accordance with the electrical signal.
Abstract translation: 目标供应装置可以包括被配置为在其内部保持液体形式的目标材料的储存器，被配置为向储存器施加振动的振动元件，配置成检测从储存器输出的目标材料的液滴的目标传感器， 被配置为基于由所述目标传感器执行的检测结果来设置参数的单元，被配置为生成基于所述参数的具有波形的电信号的功能发生器，以及被配置为向所述振动元件施加驱动电压的电源 符合电信号。
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公开(公告)号：US10555409B2
公开(公告)日：2020-02-04
申请号：US16293741
申请日：2019-03-06
Applicant: Gigaphoton Inc.
Inventor： Masaki Nakano
Abstract: A target supply apparatus according to one aspect of the present disclosure includes a nozzle configured to output a target, a plurality of vibrators including a first vibrator configured to vibrate the nozzle, a detection unit configured to detect a change in state of the target having been output from the nozzle, a vibrator switching unit configured to perform switching of a vibrator that vibrates the nozzle from the first vibrator to the other vibrator that is included in the vibrators and is different from the first vibrator, and a control unit configured to control the switching of the vibrator that vibrates the nozzle, based on the change in state of the target having been output from the nozzle, detected by the detection unit.
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公开(公告)号：US11266001B2
公开(公告)日：2022-03-01
申请号：US17011289
申请日：2020-09-03
Applicant: Gigaphoton Inc.
Inventor： Masaki Nakano
Abstract: A target supply device according to an aspect of the present disclosure includes a nozzle through which a liquid target substance is output, and a vibration unit configured to vibrate the target substance supplied to the nozzle, and the vibration unit includes a vibration element configured to vibrate in accordance with applied drive voltage from outside, a vibration transfer unit contacting the nozzle and configured to transfer vibration of the vibration element to the nozzle, a load application member configured to apply a pressing load for pressing the vibration transfer unit against the nozzle, and a load adjustment device configured to adjust the pressing load in accordance with a signal from outside.
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Patent Agency Ranking
公开(公告)号：US20200209765A1
公开(公告)日：2020-07-02
申请号：US16812831
申请日：2020-03-09
Applicant: Gigaphoton Inc.
Inventor： Masaki Nakano , Yutaka Shiraishi
Abstract: An extreme ultraviolet light generation device includes: a target supply unit including a nozzle through which a target substance in a liquid form is output into a chamber; a piezoelectric element configured to vibrate the nozzle under a droplet connection condition to regularly generate a droplet of the target substance; and a control unit configured to perform search processing of changing a drive condition of the piezoelectric element to search for a drive condition of the piezoelectric element corresponding to the droplet connection condition and configured to set a drive condition of the piezoelectric element used for generation of extreme ultraviolet light based on a result of the search processing. The control unit preliminarily drives the piezoelectric element before performing the search processing and starts the search processing after performing the preliminary drive.
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公开(公告)号：US09854658B2
公开(公告)日：2017-12-26
申请号：US15152124
申请日：2016-05-11
Applicant: Gigaphoton Inc.
Inventor： Fumio Iwamoto , Masaki Nakano , Tsukasa Hori
IPC: H05G2/00
Abstract: An extreme ultraviolet light generation apparatus may include: a chamber in which extreme ultraviolet light is generated when a target is irradiated with a laser beam inside the chamber; a target supply part configured to supply the target into the chamber; and a target collector configured to collect the target which is supplied by the target supply part but is not irradiated with the laser beam in a collection container, by receiving the target on a receiving surface having a contact angle of equal to or smaller than 90 degrees with the target.
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公开(公告)号：US09351388B2
公开(公告)日：2016-05-24
申请号：US14887450
申请日：2015-10-20
Applicant: GIGAPHOTON INC.
Inventor： Masaki Nakano , Osamu Wakabayashi
CPC classification number: H05G2/006 , B05B9/002 , B05B12/02 , B05B17/0607 , B05B17/0615 , G03F7/70033 , G03F7/70041 , G03F7/7085 , H01L21/268 , H01L22/10 , H05G2/003 , H05G2/008
Abstract: A target supply device may include a reservoir configured to hold a target material in its interior in liquid form, a vibrating element configured to apply vibrations to the reservoir, a target sensor configured to detect droplets of the target material outputted from the reservoir, a control unit configured to set parameters based on a result of the detection performed by the target sensor, a function generator configured to generate an electrical signal having a waveform based on the parameters, and a power source configured to apply a driving voltage to the vibrating element in accordance with the electrical signal.
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公开(公告)号：US11372333B2
公开(公告)日：2022-06-28
申请号：US16985158
申请日：2020-08-04
Applicant: Gigaphoton Inc.
Inventor： Masaki Nakano
Abstract: A target supply device according to an aspect of the present disclosure includes a tank in which a target substance in a liquid form is housed, a vibration element configured to generate a droplet of the target substance by providing, through a vibration propagation path, vibration to the target substance output through the nozzle, a first temperature adjustment mechanism configured to adjust a temperature of a refrigerant to be supplied to the vibration propagation path component to a first temperature, a temperature sensor configured to detect a temperature of the vibration propagation path, a second temperature adjustment mechanism configured to adjust, to a second temperature, the temperature of the vibration propagation path to which the refrigerant is supplied, and a control unit configured to control the second temperature adjustment mechanism based on an output from the temperature sensor.
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公开(公告)号：US11067907B2
公开(公告)日：2021-07-20
申请号：US16987739
申请日：2020-08-07
Applicant: Gigaphoton Inc.
Inventor： Masaki Nakano , Fumio Iwamoto
Abstract: A target supply device includes a vibrating element driven by a square wave electric signal and configured to generate a droplet of a target substance by vibrating the target substance to be output from a nozzle through a vibration propagating path; a temperature adjusting mechanism configured to adjust, to a specified temperature, a temperature of a vibration propagating path member including at least part of the vibration propagating path; a droplet detecting unit configured to output a signal containing information on a droplet detection interval indicating a time interval of droplets continuously generated; and a control unit configured to determine, based on the droplet detection interval, an operation specified temperature that is the specified temperature of the vibration propagating path member and an operation duty value that is a duty value of the electric signal used for driving the vibrating element when the droplet is irradiated with the laser beam.
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