公开(公告)号：US09174853B2

公开(公告)日：2015-11-03

申请号：US14540466

申请日：2014-11-13

Applicant: Gelest Technologies, Inc.

Inventor： Barry C. Arkles ,  George A. Timberlake, Jr.

IPC: H01L21/44 ,  C01G17/00 ,  B01D53/04 ,  B01D53/047 ,  F25J3/08 ,  C01B3/56 ,  C01B6/06

CPC classification number: C01G17/003 ,  B01D53/0462 ,  B01D53/047 ,  B01D2253/108 ,  B01D2256/16 ,  B01D2257/55 ,  C01B3/56 ,  C01B6/06 ,  C01G17/00 ,  F25J3/08

Abstract: A continuous or semi-continuous process for producing a high purity germane includes (a) preparing a reaction mixture containing hydrogen and crude germane and (b) separating the hydrogen from the crude germane by a pressure swing adsorption process. The pressure swing adsorption process results in a hydrogen-rich product stream and a germane-rich product stream. The method further includes (c) purifying the germane-rich product stream by continuous distillation thereof to remove impurities therefrom and to produce a high purity germane containing less than 0.1 volume percent of impurities.

Abstract translation: 用于生产高纯度锗烷的连续或半连续方法包括（a）制备含有氢和粗锗烷的反应混合物，和（b）通过变压吸附法从粗锗烷中分离出氢。 变压吸附过程产生富氢产物流和富含锗的产物流。 该方法还包括（c）通过连续蒸馏来纯化富含锗烷的产物流，以从其中除去杂质，并产生含有小于0.1体积％杂质的高纯度锗烷。