Abstract:
In a MEMS device (1), a first drive portion (40) is divided into a first drive section (41) and a second drive section (42). A second drive portion (50) is divided into a third drive section (51) and a fourth drive section (52). The first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other to incline an optical component (10).
Abstract:
A vibrating mirror device includes a mirror portion, a driving portion including a detecting electrode that detects an amount of deformation of a piezoelectric element when driving the mirror portion by applying a voltage to cause the piezoelectric element to deform, an insulating layer formed on a top face of the piezoelectric element, and a first lead interconnection that is formed on the top face of the insulating layer, that contacts the detecting electrode, and that extends to a region outside of the driving portion.
Abstract:
In a MEMS device (1), a first drive portion (40) is divided into a first drive section (41) and a second drive section (42). A second drive portion (50) is divided into a third drive section (51) and a fourth drive section (52). The first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other to incline an optical component (10).
Abstract:
A scanning mirror device includes a mirror, a first supporting body that supports the mirror, a plurality of securing materials that has higher rigidity than the first supporting body and supports the first supporting body, a reinforcing material that has higher rigidity than the first supporting body and is attached to the plurality of securing materials on a surface different from a surface on which the mirror is disposed, and a first driving portion that deforms the first supporting body so as to cause the mirror to be displaced around a first axis.