Invention Application
US20140198259A1 ELECTRONIC DEVICE HAVING A PROJECTOR FUNCTION AND A VIBRATING MIRROR ELEMENT 审中-公开
具有投影机功能的电子设备和振动镜像元件

ELECTRONIC DEVICE HAVING A PROJECTOR FUNCTION AND A VIBRATING MIRROR ELEMENT
Abstract:
A vibrating mirror device includes a mirror portion, a driving portion including a detecting electrode that detects an amount of deformation of a piezoelectric element when driving the mirror portion by applying a voltage to cause the piezoelectric element to deform, an insulating layer formed on a top face of the piezoelectric element, and a first lead interconnection that is formed on the top face of the insulating layer, that contacts the detecting electrode, and that extends to a region outside of the driving portion.
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