公开(公告)号：US20210238374A1

公开(公告)日：2021-08-05

申请号：US17142599

申请日：2021-01-06

申请人： Facebook Technologies, LLC

发明人： Sheng Ye ,  Renate Eva Klementine Landig ,  Kenneth Alexander Diest ,  Andrew John Ouderkirk ,  Charles Robert Bowman ,  Robert G. Bowman ,  William Arthur Hendrickson ,  Christopher J. Rueb ,  Lafe Joseph Purvis, II ,  Wenmo Sun ,  Ryan Li ,  Oleg Yaroshchuk ,  Tingling Rao ,  Arman Boromand ,  Churning Zhao ,  Morteza Khaleghimeybodi

IPC分类号： C08J9/00 ,  H01L41/09 ,  H01L41/193 ,  H01L41/45

摘要： A method of forming a voided polymer includes forming a polymerizable composition containing a polymer precursor and a solid templating agent, forming a coating of the polymerizable composition, processing the coating to form a cured polymer material having a solid phase in a plurality of defined regions, and removing at least a portion of the solid phase from the cured polymer material to form a voided polymer layer.