- 专利标题： TEMPLATED SYNTHESIS OF NANOVOIDED POLYMERS
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申请号： US17142599申请日： 2021-01-06
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公开(公告)号： US20210238374A1公开(公告)日： 2021-08-05
- 发明人: Sheng Ye , Renate Eva Klementine Landig , Kenneth Alexander Diest , Andrew John Ouderkirk , Charles Robert Bowman , Robert G. Bowman , William Arthur Hendrickson , Christopher J. Rueb , Lafe Joseph Purvis, II , Wenmo Sun , Ryan Li , Oleg Yaroshchuk , Tingling Rao , Arman Boromand , Churning Zhao , Morteza Khaleghimeybodi
- 申请人： Facebook Technologies, LLC
- 申请人地址： US CA Menlo Park
- 专利权人： Facebook Technologies, LLC
- 当前专利权人： Facebook Technologies, LLC
- 当前专利权人地址： US CA Menlo Park
- 主分类号： C08J9/00
- IPC分类号： C08J9/00 ; H01L41/09 ; H01L41/193 ; H01L41/45
摘要：
A method of forming a voided polymer includes forming a polymerizable composition containing a polymer precursor and a solid templating agent, forming a coating of the polymerizable composition, processing the coating to form a cured polymer material having a solid phase in a plurality of defined regions, and removing at least a portion of the solid phase from the cured polymer material to form a voided polymer layer.
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