公开(公告)号：US20240159710A1

公开(公告)日：2024-05-16

申请号：US18548847

申请日：2022-03-03

Applicant: FREC'N'SYS

Inventor： Sylvain BALLANDRAS ,  Thierry LAROCHE ,  Julien GARCIA ,  Emilie COURJON

IPC: G01N29/02 ,  H03H9/145 ,  H03H9/25

CPC classification number: G01N29/022 ,  H03H9/14502 ,  H03H9/25 ,  G01N2291/0422

Abstract: An acoustic wave sensor device comprises a first interdigitated transducer, a first reflection structure, a second reflection structure, a first resonance cavity comprising a first upper surface and formed between the first interdigitated transducer and the first reflection structure, and a second resonance cavity comprising a second upper surface and formed between the first interdigitated transducer and the second reflection structure. At least one of the first and second upper surfaces is covered at least partly by a metalization layer or a passivation layer. The present invention relates also to an acoustic wave sensor assembly.