-
公开(公告)号：US10748290B2
公开(公告)日：2020-08-18
申请号：US16177034
申请日：2018-10-31
Applicant: FEI COMPANY
Inventor： Umesh Adiga
Abstract: Smart metrology methods and apparatuses disclosed herein process images for automatic metrology of desired features. An example method at least includes extracting a region of interest from an image, the region including one or more boundaries between different sections, enhancing at least the extracted region of interest based on one or more filters, generating a multi-scale data set of the region of interest based on the enhanced region of interest, initializing a model of the region of interest; optimizing a plurality of active contours within the enhanced region of interest based on the model of the region of interest and further based on the multi-scale data set, the optimized plurality of active contours identifying the one or more boundaries within the region of interest, and performing metrology on the region of interest based on the identified boundaries.
-
2.发明授权公开(公告)号：US11947270B2
公开(公告)日：2024-04-02
申请号：US17176801
申请日：2021-02-16
Applicant: FEI Company
Inventor： Umesh Adiga
IPC: G03F7/20 , G03F7/00 , G06N3/04 , G06N7/00 , G06N7/01 , G06N20/00 , G06T7/00 , G06T7/11 , G06T7/12
CPC classification number: G03F7/70666 , G03F7/70091 , G06N3/04 , G06N7/01 , G06N20/00 , G06T7/0004 , G06T7/11 , G06T7/12 , G06T2207/10061 , G06T2207/20081 , G06T2207/30148
Abstract: Apparatuses and methods for metrology on devices using fast marching level sets are disclosed herein. An example method at least includes initiating a fast marching level set seed on an image, propagating a fast marching level set curve from the fast marching level set seed to locate boundaries of a plurality of regions of interest within the image, and performing metrology on the regions of interest based in part on the boundaries.
-
Patent Agency Ranking
公开(公告)号：US11494914B2
公开(公告)日：2022-11-08
申请号：US16929709
申请日：2020-07-15
Applicant: FEI Company
Inventor： Umesh Adiga
Abstract: Smart metrology methods and apparatuses disclosed herein process images for automatic metrology of desired features. An example method at least includes extracting a region of interest from an image, the region including one or more boundaries between different sections, enhancing at least the extracted region of interest based on one or more filters, generating a multi-scale data set of the region of interest based on the enhanced region of interest, initializing a model of the region of interest; optimizing a plurality of active contours within the enhanced region of interest based on the model of the region of interest and further based on the multi-scale data set, the optimized plurality of active contours identifying the one or more boundaries within the region of interest, and performing metrology on the region of interest based on the identified boundaries.
-
公开(公告)号：US12254645B2
公开(公告)日：2025-03-18
申请号：US17457622
申请日：2021-12-03
Applicant: FEI Company
Inventor： Umesh Adiga , Mark Biedrzycki
Abstract: Fiducial coordinates are obtained by aligning template with region of interest extracted from a workpiece image. Image values in the region of interest are projected along a template axis and the project values evaluated to establish a fiducial location which can be used as a reference location for locating workpiece areas for ion beam milling or other processing.
-
5.发明公开公开(公告)号：US20240094142A1
公开(公告)日：2024-03-21
申请号：US18221603
申请日：2023-07-13
Applicant: FEI Company
Inventor： Sophia E. Weeks , Umesh Adiga
CPC classification number: G01N21/9501 , G01N30/8637 , H01L22/26
Abstract: Adaptive endpoint detection is applied to delayering of a multi-layer sample utilizing a combination of dynamic and predetermined parameters. Retrospective evaluation of peaks and troughs can re-classify endpoints as signal properties emerge, enabling accurate mapping of endpoints to layers. The described techniques can be integrated with analysis operations and can be applied across a wide range of device types and manufacturing processes.
-
公开(公告)号：US20230177715A1
公开(公告)日：2023-06-08
申请号：US17457622
申请日：2021-12-03
Applicant: FEI Company
Inventor： Umesh Adiga , Mark Biedrzycki
CPC classification number: G06T7/70 , G06V10/25 , G06T7/0004 , G06T7/13 , G06T3/40 , G06T7/30 , H01J37/31 , H01J37/222 , G06T2207/30164 , G06T2207/30204 , G06T2207/10061
Abstract: Fiducial coordinates are obtained by aligning template with region of interest extracted from a workpiece image. Image values in the region of interest are projected along a template axis and the project values evaluated to establish a fiducial location which can be used as a reference location for locating workpiece areas for ion beam milling or other processing.
-
公开(公告)号：US20200349713A1
公开(公告)日：2020-11-05
申请号：US16929709
申请日：2020-07-15
Applicant: FEI Company
Inventor： Umesh Adiga
Abstract: Smart metrology methods and apparatuses disclosed herein process images for automatic metrology of desired features. An example method at least includes extracting a region of interest from an image, the region including one or more boundaries between different sections, enhancing at least the extracted region of interest based on one or more filters, generating a multi-scale data set of the region of interest based on the enhanced region of interest, initializing a model of the region of interest; optimizing a plurality of active contours within the enhanced region of interest based on the model of the region of interest and further based on the multi-scale data set, the optimized plurality of active contours identifying the one or more boundaries within the region of interest, and performing metrology on the region of interest based on the identified boundaries.
-
-
-
-
-
-
Search Results
7
records
(took 0.012 seconds)
