公开(公告)号：US11335536B2

公开(公告)日：2022-05-17

申请号：US17011378

申请日：2020-09-03

申请人： FEI Company

发明人： Marek Uncovsky ,  Michal Geryk ,  Jan Lasko

IPC分类号： H01J37/244 ,  H01J37/22 ,  H01J37/28

摘要： An embodiment of electron microscope system is described that comprises an electron column pole piece and a light guide assembly operatively coupled together. The light guide assembly also includes one or more detectors, and a mirror with a pressure limiting aperture through which an electron beam from an electron source passes. The mirror is also configured to reflect light, as well as to collect back scattered electrons and secondary electrons.

公开(公告)号：US12000789B2

公开(公告)日：2024-06-04

申请号：US17561497

申请日：2021-12-23

申请人： FEI Company

发明人： Libor Novak ,  Krishna Kanth Neelisetty ,  Veronika Hammerova ,  Jan Lasko

IPC分类号： G01N23/2204 ,  G01N23/2251 ,  G01N23/2273 ,  H01J37/20

CPC分类号： G01N23/2204 ,  G01N23/2251 ,  G01N23/2273 ,  H01J37/20

摘要： A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS systems and glove boxes in inert gas or in vacuum. The sample carrier is releasably coupled with the stage in the vacuum chamber of the CPA or the XPS. Multiple electrodes in a sample area of the sample carrier are electrically connectable with the stage by multiple spring contacts between the sample carrier and the stage.

公开(公告)号：US20210082659A1

公开(公告)日：2021-03-18

申请号：US17011378

申请日：2020-09-03

申请人： FEI Company

发明人： Marek Uncovsky ,  Michal Geryk ,  Jan Lasko

IPC分类号： H01J37/244 ,  H01J37/28 ,  H01J37/22

摘要： An embodiment of electron microscope system is described that comprises an electron column pole piece and a light guide assembly operatively coupled together. The light guide assembly also includes one or more detectors, and a mirror with a pressure limiting aperture through which an electron beam from an electron source passes. The mirror is also configured to reflect light, as well as to collect back scattered electrons and secondary electrons.