公开(公告)号：US10682664B2

公开(公告)日：2020-06-16

申请号：US16201054

申请日：2018-11-27

Applicant: Engineering System Co., Ltd.

Inventor： Kazuki Tomita ,  Kentaro Fukuda

IPC: B05C5/02 ,  H01L21/67 ,  B05B15/58 ,  B05C11/10

Abstract: In a microvolume-liquid dispenser, there is performed an application operation for dispensing a microvolume liquid present in an amount measured in nanoliters or picoliters from a nozzle tip-end opening and applying the microvolume liquid to an application surface. When the application operation has not been performed over a time interval longer than a set time interval ta, a tip-end liquid surface of an application liquid in the nozzle tip-end opening is caused to vibrate at a high amplitude that includes the position of a liquid surface height from immediately before application in the case of application at equal time intervals. The subsequently performed application operation is performed at a point in time when the liquid surface height has returned to the liquid surface height. The operation for applying the microvolume application liquid can be precisely performed in the same manner as when application is performed at equal time intervals.

公开(公告)号：US10221060B2

公开(公告)日：2019-03-05

申请号：US15119295

申请日：2015-05-12

Applicant: ENGINEERING SYSTEM CO., LTD.

Inventor： Shinya Ishida ,  Kentaro Fukuda

IPC: B67D99/00 ,  B05C5/02 ,  B67D7/02 ,  B05C11/10 ,  B05B1/08 ,  B05D1/26 ,  B01L3/02

Abstract: Provided is a microvolume liquid dispensing method in which a variable capacity passage section of a liquid passage in a microvolume liquid dispenser is pressurized from the outside and shrunk in a direction that reduces the internal capacity thereof so that a liquid that is within the variable capacity passage section is pushed toward both a downstream passage section and an up stream passage section. A microvolume of the liquid is pushed toward the downstream passage section as a result of the downstream passage section having a much larger liquid passage resistance than the upstream passage section. It is thus possible to precisely drip a microvolume liquid of a picoliter order from the tip opening of a nozzle by simple control.