公开(公告)号：US09178032B2

公开(公告)日：2015-11-03

申请号：US14163577

申请日：2014-01-24

Applicant: Electronics and Telecommunications Research Institute

Inventor： Young-Jun Yu ,  Hongkyw Choi ,  Jin Sik Choi ,  Kwang Hyo Chung ,  Jin Tae Kim ,  Doo Hyeb Youn ,  Choon Gi Choi

IPC: G01N27/414 ,  H01L29/66 ,  G01N27/12

CPC classification number: H01L29/66 ,  G01N27/128

Abstract: Provided is a gas sensor including a substrate, a sensing electrode extended in a first direction on the substrate, and a plurality of heaters disposed in a second direction crossing the first direction on the substrate. The plurality of heaters is separated at both sides of the sensing electrode. The plurality of heaters includes graphene.

Abstract translation: 提供一种气体传感器，包括基板，在基板上沿第一方向延伸的感测电极以及沿与基板上的第一方向交叉的第二方向设置的多个加热器。 多个加热器在感测电极的两侧分离。 多个加热器包括石墨烯。