公开(公告)号：US11315813B2

公开(公告)日：2022-04-26

申请号：US15551733

申请日：2015-04-10

申请人： EV Group E. Thallner GmbH

发明人： Thomas Wagenleitner ,  Thomas Plach ,  Jurgen Michael Suss ,  Jurgen Mallinger

IPC分类号： H01L21/68 ,  H01L21/673 ,  H01L21/67 ,  H01L23/00

摘要： A substrate holder having a fixing surface for holding a substrate, a system having such a substrate holder, a use of such a substrate holder, a method for bonding two substrates and a product, particularly a substrate stack, produced using such a method and also a use of such a substrate holder for such a method.

公开(公告)号：US20180040495A1

公开(公告)日：2018-02-08

申请号：US15551733

申请日：2015-04-10

申请人： EV Group E. Thallner GmbH

发明人： Thomas Wagenleitner ,  Thomas Plach ,  Jurgen Michael Suss ,  Jurgen Mallinger

IPC分类号： H01L21/673 ,  H01L21/68 ,  H01L23/00 ,  H01L21/67

CPC分类号： H01L21/67346 ,  H01L21/67092 ,  H01L21/67109 ,  H01L21/68 ,  H01L24/80

摘要： A substrate holder having a fixing surface for holding a substrate, a system having such a substrate holder, a use of such a substrate holder, a method for bonding two substrates and a product, particularly a substrate stack, produced using such a method and also a use of such a substrate holder for such a method.