公开(公告)号：US10987612B2

公开(公告)日：2021-04-27

申请号：US16097037

申请日：2017-04-28

申请人： ENTEGRIS, Inc.

发明人： Tom Leblanc ,  Joe Wildgoose ,  Marc Venet ,  Evan Warniers ,  John Gaudreau

IPC分类号： B01D46/00 ,  B01D46/52 ,  B01D27/06 ,  B01D46/10 ,  B01D27/08

摘要： Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.

公开(公告)号：US11980847B2

公开(公告)日：2024-05-14

申请号：US17073651

申请日：2020-10-19

申请人： ENTEGRIS, INC.

发明人： Marc Venet ,  Jürgen M. Lobert ,  John C. Gaudreau

IPC分类号： B01D53/34 ,  B01D46/00 ,  B01D46/44 ,  B01D46/62 ,  B01D46/88 ,  B01D53/04 ,  B01D53/72 ,  B01D53/75 ,  B01D53/82 ,  G03F7/00

CPC分类号： B01D53/346 ,  B01D46/0086 ,  B01D46/44 ,  B01D46/62 ,  B01D46/88 ,  B01D53/0454 ,  B01D53/72 ,  B01D53/75 ,  B01D53/82 ,  G03F7/70908 ,  G03F7/70991 ,  B01D2257/406 ,  B01D2257/702 ,  B01D2257/7022 ,  B01D2257/7027 ,  B01D2259/40084 ,  B01D2259/41 ,  B01D2259/4146 ,  B01D2259/4148

摘要： System and method for removing molecular contaminants from an air stream are disclosed. The system includes first, second and third filter. The first filter removes organic contaminants from an air stream passing through the first filter. The second filter is downstream of the first filter, is physically and chemically exchangeable with the first filter and removes organic contaminants from the air stream output of the first filter. The third filter, downstream of the second filter, is not exchangeable with the first filter or the second filter. The first position filter can be replaced by the second filter in the second position when the first filter in the first position becomes depleted as detected. A new filter in the second filter position is inserted. Replacing the depleted first filter with the second downstream filter reduces costs and waste while inserting the new filter in the second position ensures removing organic contaminants.

公开(公告)号：US11020704B2

公开(公告)日：2021-06-01

申请号：US15126909

申请日：2015-03-19

申请人： Entegris, Inc.

发明人： Marc Venet ,  John C. Gaudreau ,  Jürgen M Lobert

IPC分类号： B01D53/34 ,  B01D53/72 ,  B01D53/82 ,  B01D53/04 ,  B01D53/75 ,  G03F7/20 ,  B01D46/00 ,  B01D46/44

摘要： System and method for removing molecular contaminants from an air stream are disclosed. The system includes first, second and third filter. The first filter removes organic contaminants from an air stream passing through the first filter. The second filter is downstream of the first filter, is physically and chemically exchangeable with the first filter and removes organic contaminants from the air stream output of the first filter. The third filter, downstream of the second filter, is not exchangeable with the first filter or the second filter. The first position filter can be replaced by the second filter in the second position when the first filter in the first position becomes depleted as detected. A new filter in the second filter position is inserted. Replacing the depleted first filter with the second downstream filter reduces costs and waste while inserting the new filter in the second position ensures removing organic contaminants.

公开(公告)号：US20170095771A1

公开(公告)日：2017-04-06

申请号：US15126909

申请日：2015-03-19

申请人： Entegris, Inc.

发明人： Marc Venet ,  John C. Gaudreau ,  Jürgen M Lobert

IPC分类号： B01D53/34 ,  B01D46/44 ,  B01D46/00 ,  B01D53/82 ,  B01D53/72

CPC分类号： B01D53/346 ,  B01D46/0023 ,  B01D46/008 ,  B01D46/0086 ,  B01D46/44 ,  B01D53/0454 ,  B01D53/72 ,  B01D53/75 ,  B01D53/82 ,  B01D2257/406 ,  B01D2257/702 ,  B01D2257/7022 ,  B01D2257/7027 ,  B01D2259/40084 ,  B01D2259/41 ,  B01D2259/4146 ,  B01D2259/4148 ,  G03F7/70908 ,  G03F7/70991

摘要： System and method for removing molecular contaminants from an air stream are disclosed. The system includes first, second and third filter. The first filter removes organic contaminants from an air stream passing through the first filter. The second filter is downstream of the first filter, is physically and chemically exchangeable with the first filter and removes organic contaminants from the air stream output of the first filter. The third filter, downstream of the second filter, is not exchangeable with the first filter or the second filter. The first position filter can be replaced by the second filter in the second position when the first filter in the first position becomes depleted as detected. A new filter in the second filter position is inserted. Replacing the depleted first filter with the second downstream filter reduces costs and waste while inserting the new filter in the second position ensures removing organic contaminants.