公开(公告)号：US09927484B2

公开(公告)日：2018-03-27

申请号：US15193667

申请日：2016-06-27

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Oh Kee Kwon ,  Young Tak Han ,  Ki Soo Kim ,  Su Hwan Oh ,  Chul Wook Lee ,  Young Ahn Leem

IPC: G01R31/302 ,  G01R31/265 ,  H01L21/66 ,  H01L23/66 ,  H01L23/00 ,  H01L23/535 ,  G01R1/07

CPC classification number: G01R31/2656 ,  G01R1/06772 ,  G01R1/07 ,  G01R31/2635 ,  H01L22/32 ,  H01L23/535 ,  H01L23/66 ,  H01L24/05 ,  H01L24/45 ,  H01L2223/6611 ,  H01L2223/6627 ,  H01L2223/6655 ,  H01L2224/04042 ,  H01L2924/00014 ,  H01P3/00 ,  H01P5/085 ,  H01S5/0014 ,  H01S5/0427 ,  H01L2224/45099

Abstract: Provided herein is a radio frequency probe apparatus including a RF waveguide including a ground electrode and a signal electrode, a register connected to the signal electrode, a RF connector including an outer conductor connected to the ground electrode, an inner conductor connected to the signal electrode, and a dielectric body filling a portion between the outer conductor and the inner conductor, and a single tip probe connected to the signal electrode of the RF waveguide, or the register.