专利检索 ap:("EBARA CORPORATION") AND inv:"Koichi Iwasaki" 第 1 页

1.

发明授权
Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method 有权

公开(公告)号：US11946470B2

公开(公告)日：2024-04-02

申请号：US16467472

申请日：2018-03-13

申请人： EBARA CORPORATION

发明人： Keiji Maishigi , Tetsuro Sugiura , Katsuaki Usui , Masahiro Hatakeyama , Chikako Honma , Toru Osuga , Koichi Iwasaki , Jie Yuan Lin

IPC分类号： F04C28/28 , F04D27/00 , G06F9/54 , G06F17/18

CPC分类号： F04C28/28 , F04D27/001 , G06F9/542 , G06F17/18

摘要： An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including:

a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and
a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.