摘要:
A superlattice structure, and a semiconductor device including the same, include a plurality of pairs of layers are in a pattern repeated at least two times, in which a first layer and a second layer constitute a pair, the first layer is formed of AlxInyGa1-x-yN (where 0≦x and y≦1), the second layer is formed of AlaInbGa1-a-bN (where 0≦a, b≦1 and x≠a), the first and second layers have the same thickness, and a total thickness of each of the plurality of pairs of layers is different than each other.
摘要翻译:超晶格结构以及包括该超晶格结构的半导体器件包括多层重叠至少两次的图案,其中第一层和第二层构成一对,第一层由Al x In y Ga 1- x-yN(其中0 @ x和y @ 1),第二层由AlaInbGa1-a-bN(其中0 @ a,b @ 1和x
摘要:
A semiconductor buffer structure includes a silicon substrate, a nucleation layer formed on the silicon substrate, and a buffer layer formed on the nucleation layer. The buffer layer includes a first layer formed of a nitride semiconductor material having a uniform composition rate, a second layer formed of the same material as the nucleation layer on the first layer, and a third layer formed of the same material with the same composition ratio as the first layer on the second layer.
摘要:
According to example embodiments, a semiconductor light emitting device includes a first semiconductor layer, a pit enlarging layer on the first semiconductor layer, an active layer on the pit enlarging layer, a hole injection layer, and a second semiconductor layer on the hole injection layer. The first semiconductor layer is doped a first conductive type. An upper surface of the pit enlarging layer and side surfaces of the active layer define pits having sloped surfaces on the dislocations. The pits are reverse pyramidal spaces. The hole injection layer is on a top surface of the active layer and the sloped surfaces of the pits. The second semiconductor layer doped a second conductive type that is different than the first conductive type.
摘要:
A semiconductor buffer structure may include a silicon substrate and a buffer layer that is formed on the silicon substrate. The buffer layer may include a first layer, a second layer formed on the first layer, and a third layer formed on the second layer. The first layer may include AlxInyGa1-x-yN (0≦x≦1, 0≦y≦1, 0≦x+y≦1) and have a lattice constant LP1 that is smaller than a lattice constant LP0 of the silicon substrate. The second layer may include AlxInyGa1-x-yN (0≦x
摘要翻译:半导体缓冲结构可以包括硅衬底和形成在硅衬底上的缓冲层。 缓冲层可以包括第一层,形成在第一层上的第二层和形成在第二层上的第三层。 第一层可以包括Al x In y Ga 1-x-y N(0 @ x @ 1,0 @ y @ 1,x @ x + y @ 1),并且具有小于硅衬底的晶格常数LP0的晶格常数LP1。 第二层可以包括Al x In y Ga 1-x-y N(0 @ x <1,0
摘要:
A method of manufacturing a semiconductor device includes forming a silicon substrate, forming a buffer layer on the silicon substrate, and forming a nitride semiconductor layer on the buffer layer. The buffer layer includes a first layer, a second layer, and a third layer. The first layer includes AlxInyGa1-x-yN (0≦x≦1, 0≦y≦1, 0≦x+y≦1) and has a lattice constant LP1 that is smaller than a lattice constant LP0 of the silicon substrate. The second layer is formed on the first layer, includes AlxInyGa1-x-yN (0≦x
摘要翻译:制造半导体器件的方法包括形成硅衬底,在硅衬底上形成缓冲层,并在缓冲层上形成氮化物半导体层。 缓冲层包括第一层,第二层和第三层。 第一层包括Al x In y Ga 1-x-y N(0 @ x @ 1,0 @ y @ 1,x @ x + y @ 1),并且具有小于硅衬底的晶格常数LP0的晶格常数LP1。 第二层形成在第一层上,包括Al x In y Ga 1-x-y N(0≤x≤1,0≤y≤1,0@ x + y <1),并且具有大于LP1的晶格常数LP2, 小于LP0。 第三层形成在第二层上,包括Al x In y Ga 1-x-y N(0≤x≤1,0≤y≤1,0@ x + y <1),并具有小于LP2的晶格常数LP3。
摘要:
A semiconductor device includes a silicon substrate; a nitride nucleation layer disposed on the silicon substrate; at least one superlattice layer disposed on the nitride nucleation layer; and at least one gallium nitride-based semiconductor layer disposed on the superlattice layer. The at least one superlattice layer includes a stack of complex layers, each complex layer including a first layer and a second layer such that each of the complex layers has a plurality of nitride semiconductor layers having different compositions, at least one of the plurality of nitride semiconductor layers having a different thickness based on a location of the at least one nitride semiconductor layer within the stack, and at least one stress control layer having a thickness greater than a critical thickness for pseudomorphic growth.