公开(公告)号：US20190019712A1

公开(公告)日：2019-01-17

申请号：US16034600

申请日：2018-07-13

申请人： DISCO CORPORATION

发明人： Kenta Chito ,  Hidekazu Iida ,  Tomohiro Yamada ,  Yoshiteru Nishida ,  Hiroyuki Takahashi ,  Ryoko Fujiya ,  Susumu Yokoo

IPC分类号： H01L21/683 ,  H01L21/67 ,  H01L21/3065

摘要： Disclosed herein is an electrostatic chuck having a holding surface for holding a wafer with a tape attached to one side of the wafer in the condition where the tape is in contact with the holding surface. The electrostatic chuck includes a disk-shaped member having a plurality of fine holes communicating with a vacuum source, the fine holes being exposed to the holding surface, a plurality of asperities formed on the holding surface and connected to the fine holes, and an electrode embedded in the disk-shaped member. When the vacuum source is operated to produce a vacuum on the holding surface through the fine holes and thereby hold the wafer through the tape on the holding surface under suction, the asperities formed on the holding surface function as a suction passage communicating with the fine holes.

公开(公告)号：US10896836B2

公开(公告)日：2021-01-19

申请号：US16034600

申请日：2018-07-13

申请人： DISCO CORPORATION

发明人： Kenta Chito ,  Hidekazu Iida ,  Tomohiro Yamada ,  Yoshiteru Nishida ,  Hiroyuki Takahashi ,  Ryoko Fujiya ,  Susumu Yokoo

IPC分类号： H01L21/683 ,  H01L21/67 ,  H01L21/3065 ,  H01L21/687

摘要： An electrostatic chuck is provided and has a holding surface for holding a wafer with a tape attached to one side of the wafer where the tape is in contact with the holding surface. The electrostatic chuck includes a disk-shaped member having a plurality of fine holes communicating with a vacuum source, where the fine holes are exposed to the holding surface. The disk-shaped member also includes a plurality of asperities formed on the holding surface and connected to the fine holes, and an electrode embedded in the disk-shaped member. The vacuum source is operated to produce a vacuum on the holding surface through the fine holes and thereby hold the wafer through the tape on the holding surface under suction, where the asperities formed on the holding surface function as a suction passage communicating with the fine holes.

公开(公告)号：US10112285B2

公开(公告)日：2018-10-30

申请号：US15267703

申请日：2016-09-16

申请人： DISCO CORPORATION

发明人： Ryoko Fujiya ,  Yoshiyasu Nakagawa

IPC分类号： B24D7/06 ,  B24D7/10 ,  B24B55/02 ,  B24B7/02 ,  B24B7/04

摘要： Disclosed herein is a grinding wheel including a wheel base to be fixed to a spindle, a plurality of abrasive members fixed to the wheel base, and a plurality of grinding water supply holes for supplying a grinding water to the abrasive members. Each abrasive member is formed as a segment abrasive having an outer surface extending downward from the lower surface of the wheel base so as to be inclined radially outward. The plural abrasive members are arranged annularly at given intervals. The plural grinding water supply holes are formed on the lower surface of the wheel base in the vicinity of the abrasive members so as to each correspond to the abrasive members in the condition where each grinding water supply hole lies on a line connecting the corresponding abrasive member and the axis of rotation of the wheel base.

公开(公告)号：US20170080547A1

公开(公告)日：2017-03-23

申请号：US15267703

申请日：2016-09-16

申请人： DISCO CORPORATION

发明人： Ryoko Fujiya ,  Yoshiyasu Nakagawa

IPC分类号： B24D7/06 ,  B24B7/02

CPC分类号： B24D7/06 ,  B24B7/02 ,  B24B7/04 ,  B24B55/02 ,  B24D7/10

摘要： Disclosed herein is a grinding wheel including a wheel base to be fixed to a spindle, a plurality of abrasive members fixed to the wheel base, and a plurality of grinding water supply holes for supplying a grinding water to the abrasive members. Each abrasive member is formed as a segment abrasive having an outer surface extending downward from the lower surface of the wheel base so as to be inclined radially outward. The plural abrasive members are arranged annularly at given intervals. The plural grinding water supply holes are formed on the lower surface of the wheel base in the vicinity of the abrasive members so as to each correspond to the abrasive members in the condition where each grinding water supply hole lies on a line connecting the corresponding abrasive member and the axis of rotation of the wheel base.