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公开(公告)号:US20220327669A1
公开(公告)日:2022-10-13
申请号:US17846395
申请日:2022-06-22
Applicant: DAIKIN INDUSTRIES, LTD.
Inventor: Rumi KAWABE , Shuuto YAMAGATA , Ikuo YAMAMOTO
Abstract: An evaluation method for evaluating a spot generated on a substrate that has been treated with a repellent, the method includes an acquiring step of acquiring image data including data on the substrate that has been treated with the repellent to be evaluated, a spot-detecting step of creating a smoothed image from the image data, binarizing the smoothed image and detecting a region of a spot generated on the substrate, and a spot-evaluating step of determining an evaluation value of the spot according to an area of the region of the spot detected. Also disclosed is a repellent evaluation device including an acquire, a classifier, a detector and an evaluator.