公开(公告)号：US20180092196A1

公开(公告)日：2018-03-29

申请号：US15710086

申请日：2017-09-20

申请人： DAIHEN Corporation

发明人： Hayato NOTOMI ,  Shigeki AMADATSU ,  Eiji TATEBE ,  Michio TANIGUCHI

IPC分类号： H05H1/46 ,  H01J37/32

CPC分类号： H05H1/46 ,  H01J37/321 ,  H01J37/32174 ,  H01J37/3244 ,  H01J37/3266 ,  H05H2001/4675

摘要： A plasma generation apparatus includes a chamber, a high-frequency power source, a magnetic field generator and a parallel capacitor. The chamber has an inner, toroidal-shaped electric discharge space. The high-frequency power source outputs a high-frequency current to the magnetic field generator, which generates a high-frequency magnetic field upon flowing of the high-frequency current therethrough. The parallel capacitor is connected in parallel to the magnetic field generator.

公开(公告)号：US20170062183A1

公开(公告)日：2017-03-02

申请号：US15247517

申请日：2016-08-25

申请人： DAIHEN Corporation

发明人： Michio TANIGUCHI ,  Shigeki AMADATSU

IPC分类号： H01J37/32

CPC分类号： H01J37/321 ,  H01J37/32339 ,  H01J37/32458 ,  H01J37/32513 ,  H01J37/3266 ,  H01J2237/327 ,  H01J2237/332 ,  H01J2237/334

摘要： An inductive-coupling plasma generator includes an electroconductive chamber with a toroidal-shaped electrical discharge space formed inside. The plasma generator also includes a high-frequency power source connected to the chamber. The power source is configured to cause a high-frequency current to flow through the chamber along a toroidal direction.

摘要翻译： 电感耦合等离子体发生器包括在内部形成有环形放电空间的导电室。 等离子体发生器还包括连接到腔室的高频电源。 电源被配置为使得高频电流沿着环形方向流过腔室。