公开(公告)号：US20240418937A1

公开(公告)日：2024-12-19

申请号：US18337008

申请日：2023-06-18

Applicant: Tin Komljenovic ,  Minh Tran ,  Zeyu Zhang ,  Chong Zhang

Inventor： Tin Komljenovic ,  Minh Tran ,  Zeyu Zhang ,  Chong Zhang

IPC: G02B6/27

Abstract: A device has first, second and third elements fabricated on a common substrate. The first element supports a first optical mode in an active waveguide structure characterized by a mesa. The second element supports a second optical mode in a passive waveguide structure. The third element, at least partly butt-coupled to the first element, supports an intermediate optical mode in an intermediate waveguide structure characterized by a waveguide core cross section including a shallow step. A tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the second optical mode and the intermediate optical mode. No adiabatic transformation occurs between the intermediate optical mode and the first optical mode. Lithographic alignment marks facilitate precise alignment of the three elements during device fabrication.

公开(公告)号：US20220120970A1

公开(公告)日：2022-04-21

申请号：US17078859

申请日：2020-10-23

Applicant: Chong Zhang ,  Hyun Dai Park ,  Minh Tran ,  Tin Komljenovic

Inventor： Chong Zhang ,  Hyun Dai Park ,  Minh Tran ,  Tin Komljenovic

IPC: G02B6/14 ,  G02B6/13 ,  G02B6/12 ,  G02B6/122 ,  G02B6/132

Abstract: An optical device comprises first, second and third elements fabricated on a common substrate. The first element comprises an active waveguide structure supporting a first optical mode, the second element, fabricated on a planarized top surface of the first element, comprises a passive waveguide structure supporting a second optical mode, and the third element, at least partly butt-coupled to the first element, comprises an intermediate waveguide structure, positioned such that a top surface of the intermediate structure underlies a bottom surface of the passive waveguide structure. If the first optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the first optical mode and the second optical mode. Mutual alignments of the first, second and third elements are defined using lithographic alignment marks.

公开(公告)号：US11287573B1

公开(公告)日：2022-03-29

申请号：US17078859

申请日：2020-10-23

Applicant: Chong Zhang ,  Hyun Dai Park ,  Minh Tran ,  Tin Komljenovic

Inventor： Chong Zhang ,  Hyun Dai Park ,  Minh Tran ,  Tin Komljenovic

IPC: G02B6/122 ,  G02B6/14 ,  G02B6/13 ,  G02B6/12 ,  G02B6/132

Abstract: An optical device comprises first, second and third elements fabricated on a common substrate. The first element comprises an active waveguide structure supporting a first optical mode, the second element, fabricated on a planarized top surface of the first element, comprises a passive waveguide structure supporting a second optical mode, and the third element, at least partly butt-coupled to the first element, comprises an intermediate waveguide structure, positioned such that a top surface of the intermediate structure underlies a bottom surface of the passive waveguide structure. If the first optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the first optical mode and the second optical mode. Mutual alignments of the first, second and third elements are defined using lithographic alignment marks.

公开(公告)号：US20210088727A1

公开(公告)日：2021-03-25

申请号：US16600349

申请日：2019-10-11

Applicant: Hyundai Park ,  Tin Komljenovic ,  Chong Zhang ,  Minh Tran

Inventor： Hyundai Park ,  Tin Komljenovic ,  Chong Zhang ,  Minh Tran

IPC: G02B6/14 ,  G02B6/122 ,  G02B6/12 ,  G02B6/13

Abstract: A device providing efficient transformation between an initial optical mode and a second optical mode includes first, second and third elements fabricated on a common substrate. The first element includes first and second active sub-layers supporting initial and final optical modes with efficient mode transformation therebetween. The second element includes a passive waveguide structure supporting a second optical mode. The third element, at least partly butt-coupled to the first element, includes an intermediate waveguide structure supporting an intermediate optical mode. If the final optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in the second or third elements facilitates efficient transformation between the intermediate optical mode and the second optical mode. Precise alignment of sub-elements formed in one of the elements, relative to sub-elements formed in another one of the elements, is defined using lithographic alignment marks.

公开(公告)号：US20240372332A1

公开(公告)日：2024-11-07

申请号：US18313347

申请日：2023-05-07

Applicant: Chong Zhang ,  Zeyu Zhang ,  Minh Tran ,  Tin Komljenovic

Inventor： Chong Zhang ,  Zeyu Zhang ,  Minh Tran ,  Tin Komljenovic

IPC: H01S5/22

Abstract: A heterogenous device includes a passive waveguide structure and an active waveguide structure. The passive waveguide structure is attached to a substrate and includes a dielectric layer. The active waveguide structure is attached to a top surface of the passive waveguide structure and includes a quantum well layer overlying an InGaP layer. The InGaP layer provides n-contact functionality.
A heterogenous device includes a passive waveguide structure and an active waveguide structure. The passive waveguide structure is attached to a substrate and includes a semiconductor layer. The active waveguide structure is attached to a top surface of the passive waveguide structure and includes a quantum well layer overlying an InGaP layer. The InGaP layer provides n-contact functionality.

公开(公告)号：US11719883B1

公开(公告)日：2023-08-08

申请号：US17675328

申请日：2022-02-18

Applicant: Chong Zhang ,  Minh Tran ,  Tin Komljenovic ,  Hyun Dai Park

Inventor： Chong Zhang ,  Minh Tran ,  Tin Komljenovic ,  Hyun Dai Park

IPC: G02B6/122 ,  G02B6/30

CPC classification number: G02B6/1228 ,  G02B6/305

Abstract: A device includes three elements fabricated on a common substrate. The first element includes an active waveguide structure having at least three sub-layers supporting a first optical mode. The second element has a passive waveguide structure supporting a second optical mode, and the third element, butt-coupled to the first element, has an intermediate waveguide structure supporting intermediate optical modes. One sub-layer in the active waveguide structure includes an n-contact layer, another sub-layer includes a p-contact layer, and a third sub-layer includes an active region. A tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the second optical mode and an intermediate optical mode. No adiabatic transformation occurs between that intermediate optical mode and the first optical mode. Mutual alignments of the three elements are defined using lithographic alignment marks that facilitate precise alignment between layers formed fabrication of the elements.

公开(公告)号：US20230420916A1

公开(公告)日：2023-12-28

申请号：US17851688

申请日：2022-06-28

Applicant: Chong Zhang ,  Minh Tran ,  Tin Komljenovic

Inventor： Chong Zhang ,  Minh Tran ,  Tin Komljenovic

IPC: H01S5/10 ,  H01S5/02 ,  H01S5/024 ,  H01S5/026

CPC classification number: H01S5/1014 ,  H01S5/0213 ,  H01S5/02476 ,  H01S5/026

Abstract: A device includes a first element having a passive waveguide structure supporting a first optical mode, a second element providing heat spreading functionality, a third element thermally coupled to the second element, having an active waveguide structure supporting a second optical mode, and a fourth element, at least partly butt-coupled to the third element, having an intermediate waveguide structure supporting intermediate optical modes. A tapered waveguide structure in either one of the first and fourth elements facilitates efficient adiabatic transformation between the first optical mode and one of the intermediate optical modes. No adiabatic transformation occurs between any of the intermediate optical modes and the second optical mode. Mutual alignments of the first, second, third and fourth elements are defined using lithographic alignment marks that facilitate precise alignment between layers formed during processing steps of fabricating the first, second, third and fourth elements.

公开(公告)号：US20230266532A1

公开(公告)日：2023-08-24

申请号：US17675328

申请日：2022-02-18

Applicant: Chong Zhang ,  Minh Tran ,  Tin Komljenovic ,  Hyun Dai Park

Inventor： Chong Zhang ,  Minh Tran ,  Tin Komljenovic ,  Hyun Dai Park

IPC: G02B6/122 ,  G02B6/30

CPC classification number: G02B6/1228 ,  G02B6/305

Abstract: A device includes three elements fabricated on a common substrate. The first element includes an active waveguide structure having at least three sub-layers supporting a first optical mode. The second element has a passive waveguide structure supporting a second optical mode, and the third element, butt-coupled to the first element, has an intermediate waveguide structure supporting intermediate optical modes. One sub-layer in the active waveguide structure includes an n-contact layer, another sub-layer includes a p-contact layer, and a third sub-layer includes an active region. A tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the second optical mode and an intermediate optical mode. No adiabatic transformation occurs between that intermediate optical mode and the first optical mode. Mutual alignments of the three elements are defined using lithographic alignment marks that facilitate precise alignment between layers formed fabrication of the elements.

公开(公告)号：US11480734B2

公开(公告)日：2022-10-25

申请号：US16600349

申请日：2019-10-11

Applicant: Hyundai Park ,  Tin Komljenovic ,  Chong Zhang ,  Minh Tran

Inventor： Hyundai Park ,  Tin Komljenovic ,  Chong Zhang ,  Minh Tran

IPC: G02B6/12 ,  G02B6/26 ,  G02B6/42 ,  G02B6/14 ,  G02B6/122 ,  G02B6/13

Abstract: A device providing efficient transformation between an initial optical mode and a second optical mode includes first, second and third elements fabricated on a common substrate. The first element includes first and second active sub-layers supporting initial and final optical modes with efficient mode transformation therebetween. The second element includes a passive waveguide structure supporting a second optical mode. The third element, at least partly butt-coupled to the first element, includes an intermediate waveguide structure supporting an intermediate optical mode. If the final optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in the second or third elements facilitates efficient transformation between the intermediate optical mode and the second optical mode. Precise alignment of sub-elements formed in one of the elements, relative to sub-elements formed in another one of the elements, is defined using lithographic alignment marks.

公开(公告)号：US20210373235A1

公开(公告)日：2021-12-02

申请号：US17015785

申请日：2020-09-09

Applicant: Chong Zhang ,  Hyun Dai Park ,  Minh Tran ,  Tin Komljenovic

Inventor： Chong Zhang ,  Hyun Dai Park ,  Minh Tran ,  Tin Komljenovic

IPC: G02B6/122 ,  G02B6/12 ,  H01S5/10 ,  H01S5/026

Abstract: A device comprises first, second and third elements fabricated on a common substrate. The first element comprises an active waveguide structure comprising: one portion, of effective cross-sectional area A1, supporting a first optical mode; and a second portion, butt-coupled to the first portion, of effective cross-sectional area A2>A1. The second element comprises a passive waveguide structure supporting a second optical mode. The third element, at least partly butt-coupled to the second portion, comprises an intermediate waveguide structure supporting intermediate optical modes. If the first optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the first optical mode and one intermediate optical mode. No adiabatic transformation occurs between any intermediate optical mode and the first optical mode. Mutual alignments of the elements are defined using lithographic marks.