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公开(公告)号：US11719883B1
公开(公告)日：2023-08-08
申请号：US17675328
申请日：2022-02-18
申请人： Chong Zhang , Minh Tran , Tin Komljenovic , Hyun Dai Park
发明人： Chong Zhang , Minh Tran , Tin Komljenovic , Hyun Dai Park
CPC分类号： G02B6/1228 , G02B6/305
摘要： A device includes three elements fabricated on a common substrate. The first element includes an active waveguide structure having at least three sub-layers supporting a first optical mode. The second element has a passive waveguide structure supporting a second optical mode, and the third element, butt-coupled to the first element, has an intermediate waveguide structure supporting intermediate optical modes. One sub-layer in the active waveguide structure includes an n-contact layer, another sub-layer includes a p-contact layer, and a third sub-layer includes an active region. A tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the second optical mode and an intermediate optical mode. No adiabatic transformation occurs between that intermediate optical mode and the first optical mode. Mutual alignments of the three elements are defined using lithographic alignment marks that facilitate precise alignment between layers formed fabrication of the elements.
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2.发明申请公开(公告)号：US20220120970A1
公开(公告)日：2022-04-21
申请号：US17078859
申请日：2020-10-23
申请人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
发明人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
摘要： An optical device comprises first, second and third elements fabricated on a common substrate. The first element comprises an active waveguide structure supporting a first optical mode, the second element, fabricated on a planarized top surface of the first element, comprises a passive waveguide structure supporting a second optical mode, and the third element, at least partly butt-coupled to the first element, comprises an intermediate waveguide structure, positioned such that a top surface of the intermediate structure underlies a bottom surface of the passive waveguide structure. If the first optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the first optical mode and the second optical mode. Mutual alignments of the first, second and third elements are defined using lithographic alignment marks.
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3.发明授权公开(公告)号：US11287573B1
公开(公告)日：2022-03-29
申请号：US17078859
申请日：2020-10-23
申请人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
发明人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
摘要： An optical device comprises first, second and third elements fabricated on a common substrate. The first element comprises an active waveguide structure supporting a first optical mode, the second element, fabricated on a planarized top surface of the first element, comprises a passive waveguide structure supporting a second optical mode, and the third element, at least partly butt-coupled to the first element, comprises an intermediate waveguide structure, positioned such that a top surface of the intermediate structure underlies a bottom surface of the passive waveguide structure. If the first optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the first optical mode and the second optical mode. Mutual alignments of the first, second and third elements are defined using lithographic alignment marks.
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公开(公告)号：US20210088727A1
公开(公告)日：2021-03-25
申请号：US16600349
申请日：2019-10-11
申请人： Hyundai Park , Tin Komljenovic , Chong Zhang , Minh Tran
发明人： Hyundai Park , Tin Komljenovic , Chong Zhang , Minh Tran
摘要： A device providing efficient transformation between an initial optical mode and a second optical mode includes first, second and third elements fabricated on a common substrate. The first element includes first and second active sub-layers supporting initial and final optical modes with efficient mode transformation therebetween. The second element includes a passive waveguide structure supporting a second optical mode. The third element, at least partly butt-coupled to the first element, includes an intermediate waveguide structure supporting an intermediate optical mode. If the final optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in the second or third elements facilitates efficient transformation between the intermediate optical mode and the second optical mode. Precise alignment of sub-elements formed in one of the elements, relative to sub-elements formed in another one of the elements, is defined using lithographic alignment marks.
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公开(公告)号：US20230420916A1
公开(公告)日：2023-12-28
申请号：US17851688
申请日：2022-06-28
申请人： Chong Zhang , Minh Tran , Tin Komljenovic
发明人： Chong Zhang , Minh Tran , Tin Komljenovic
CPC分类号： H01S5/1014 , H01S5/0213 , H01S5/02476 , H01S5/026
摘要： A device includes a first element having a passive waveguide structure supporting a first optical mode, a second element providing heat spreading functionality, a third element thermally coupled to the second element, having an active waveguide structure supporting a second optical mode, and a fourth element, at least partly butt-coupled to the third element, having an intermediate waveguide structure supporting intermediate optical modes. A tapered waveguide structure in either one of the first and fourth elements facilitates efficient adiabatic transformation between the first optical mode and one of the intermediate optical modes. No adiabatic transformation occurs between any of the intermediate optical modes and the second optical mode. Mutual alignments of the first, second, third and fourth elements are defined using lithographic alignment marks that facilitate precise alignment between layers formed during processing steps of fabricating the first, second, third and fourth elements.
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6.发明公开公开(公告)号：US20230266532A1
公开(公告)日：2023-08-24
申请号：US17675328
申请日：2022-02-18
申请人： Chong Zhang , Minh Tran , Tin Komljenovic , Hyun Dai Park
发明人： Chong Zhang , Minh Tran , Tin Komljenovic , Hyun Dai Park
CPC分类号： G02B6/1228 , G02B6/305
摘要： A device includes three elements fabricated on a common substrate. The first element includes an active waveguide structure having at least three sub-layers supporting a first optical mode. The second element has a passive waveguide structure supporting a second optical mode, and the third element, butt-coupled to the first element, has an intermediate waveguide structure supporting intermediate optical modes. One sub-layer in the active waveguide structure includes an n-contact layer, another sub-layer includes a p-contact layer, and a third sub-layer includes an active region. A tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the second optical mode and an intermediate optical mode. No adiabatic transformation occurs between that intermediate optical mode and the first optical mode. Mutual alignments of the three elements are defined using lithographic alignment marks that facilitate precise alignment between layers formed fabrication of the elements.
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公开(公告)号：US11480734B2
公开(公告)日：2022-10-25
申请号：US16600349
申请日：2019-10-11
申请人： Hyundai Park , Tin Komljenovic , Chong Zhang , Minh Tran
发明人： Hyundai Park , Tin Komljenovic , Chong Zhang , Minh Tran
摘要： A device providing efficient transformation between an initial optical mode and a second optical mode includes first, second and third elements fabricated on a common substrate. The first element includes first and second active sub-layers supporting initial and final optical modes with efficient mode transformation therebetween. The second element includes a passive waveguide structure supporting a second optical mode. The third element, at least partly butt-coupled to the first element, includes an intermediate waveguide structure supporting an intermediate optical mode. If the final optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in the second or third elements facilitates efficient transformation between the intermediate optical mode and the second optical mode. Precise alignment of sub-elements formed in one of the elements, relative to sub-elements formed in another one of the elements, is defined using lithographic alignment marks.
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公开(公告)号：US20210373235A1
公开(公告)日：2021-12-02
申请号：US17015785
申请日：2020-09-09
申请人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
发明人： Chong Zhang , Hyun Dai Park , Minh Tran , Tin Komljenovic
摘要： A device comprises first, second and third elements fabricated on a common substrate. The first element comprises an active waveguide structure comprising: one portion, of effective cross-sectional area A1, supporting a first optical mode; and a second portion, butt-coupled to the first portion, of effective cross-sectional area A2>A1. The second element comprises a passive waveguide structure supporting a second optical mode. The third element, at least partly butt-coupled to the second portion, comprises an intermediate waveguide structure supporting intermediate optical modes. If the first optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the first optical mode and one intermediate optical mode. No adiabatic transformation occurs between any intermediate optical mode and the first optical mode. Mutual alignments of the elements are defined using lithographic marks.
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公开(公告)号：US20240332907A1
公开(公告)日：2024-10-03
申请号：US18127983
申请日：2023-03-29
申请人： Tin Komljenovic , Zeyu Zhang , Chong Zhang , Minh Tran
发明人： Tin Komljenovic , Zeyu Zhang , Chong Zhang , Minh Tran
CPC分类号： H01S5/2228 , H01S5/0612 , H01S5/1014
摘要： A device is made up of an active structure attached to a substrate, the active structure having a facet through which light couples between the active structure and another structure attached to the substrate; and an active region comprising a quantum well region that includes a sub-region, adjacent the facet, configured to undergo QWI in response to heat. The active structure also contains a heating element, positioned close to the facet and operable such that heat generated by the heating element raises a temperature of the sub-region of the active region near the facet high enough to activate QWI in that sub-region, in turn causing a reduction in optical absorption, without raising temperatures in any other portion of the active region enough to cause significant thermal stress at any interface between the substrate and the active structure.
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公开(公告)号：US20240291239A1
公开(公告)日：2024-08-29
申请号：US18114244
申请日：2023-02-25
申请人： Tin Komljenovic , Zeyu Zhang , Chong Zhang , Minh Tran
发明人： Tin Komljenovic , Zeyu Zhang , Chong Zhang , Minh Tran
摘要： A device is described, having an active structure in an element attached to a substrate. The active structure comprises an active region that includes a quantum well region. All material layers that underlie the active structure and overlie the substrate are dielectric layers. An optical mode supported by the device in a region including the active structure is characterized by an amplitude having a peak value offset, in a direction towards the substrate, from the quantum well region.
In one form of the device, a passive structure attached to the substrate is optically coupled to the active structure.
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