Abstract:
The present invention is to provide a method for producing a semiconductor laser diode (LD) with an enhanced ESD resistance. The method includes a step for forming an aluminum film on a facet of the LD and a step for forming an aluminum oxide film on the aluminum film. The underlying aluminum film is oxidized during the formation of the aluminum oxide film to form a double aluminum oxide layer. The ratio of the oxide composition of the underlying aluminum oxide film is smaller than that of the upper aluminum oxide film.
Abstract:
The present invention is to provide a method for producing a semiconductor laser diode (LD) with an enhanced ESD resistance. The method includes a step for forming an aluminum film on a facet of the LD and a step for forming an aluminum oxide film on the aluminum film. The underlying aluminum film is oxidized during the formation of the aluminum oxide film to form a double aluminum oxide layer. The ratio of the oxide composition of the underlying aluminum oxide film is smaller than that of the upper aluminum oxide film.
Abstract:
An electromagnetic actuator having: a stator and a movable member disposed in a central hole of a coil member of the stator movable in an axial direction; a coupling rod fixed to the movable member; and an elastic stopper having a ring shaped sealing unit at its outer periphery part, a first stopper unit at its center part, a coupling unit that mutually couples the sealing unit and the first stopper unit, and second stopper units located radially between the sealing unit and the first stopper unit at respective circumferential positions. The sealing unit is compressed between the bottom wall of a housing and a lid member to form a sealing mechanism that fluid-tightly close an opening of an adjustment hole. The first stopper unit axially faces the coupling rod bottom with a first separation distance, and the second stopper units axially face the movable member bottom with a second separation distance greater than the first.
Abstract:
A method of setting control data by an active vibration isolation control system includes the steps of selecting, when a frequency of a pulse signal actually detected is superior to a predetermined frequency, appropriate control data selected from among predetermined data maps incorporating control data capable of securing, in accordance with various vehicle driving conditions respectively, a control condition in which operation of the vibrator is preferably controlled, calculating a deviation between the appropriate control data commensurate with the actual vehicle driving condition at the time of controlling and actually detected data representing vibration subjected to a vehicle specific position, the actually detected data obtained in terms of a same physics amount as a physics amount of the control data, and modifying the appropriate control data on the basis of the calculated deviation.
Abstract:
A firewall apparatus including plural virtual firewalls, each virtual firewall including a dependent firewall policy, is disclosed. The firewall apparatus includes: a distribution management table for managing a user name and a virtual firewall ID; a part configured to receive authentication information for network connection from a user terminal, and hold a user name included in the authentication information; a part configured to report the authentication information to the authentication server; and a part configured to receive an authentication response from the authentication server, and hold a user ID, included in the authentication response, to be provided to the user terminal. The firewall apparatus registers the user ID in the distribution management table associating the user ID with the user name.
Abstract:
A method of manufacturing a silicon carbide semiconductor device having a MOS structure includes preparing a substrate made of silicon carbide, and forming a channel region, a first impurity region, a second impurity region, a gate insulation layer, and a gate electrode to form a semiconductor element on the substrate. In addition, a film is formed on the semiconductor element to provide a material of an interlayer insulation layer, and a reflow process is performed at a temperature about 700° C. or over in an wet atmosphere so that the interlayer insulation layer is formed from the film and an edge portion of the gate electrode is rounded and oxidized.
Abstract:
A vibration controller includes a map controller, an adaptive controller, a set-up frequency judge/switcher, and an actuator. The map controller includes a data map storage for storing data on control signals determined in advance for a vibration insulator, and a signal generator for selecting one of the data, depending on a frequency of a cyclically pulsating signal emitted from a vibration generating source of a vehicle, from the data map storage and generating a control signal. The adaptive controller generates the control signal with respect to the cyclically pulsating signal using an adaptive control method. The set-up frequency judge/switcher switches from the map controller to the adaptive controller or vice versa based on the frequency of the cyclically pulsating signal. The actuator actuates an actuator of the vibration insulator based on the control signal generated by the map controller or the adaptive controller, whereby inhibiting the vehicle from vibrating.
Abstract:
A method of manufacturing a silicon carbide semiconductor device having a MOS structure includes preparing a substrate made of silicon carbide, and forming a channel region, a first impurity region, a second impurity region, a gate insulation layer, and a gate electrode to form a semiconductor element on the substrate. In addition, a film is formed on the semiconductor element to provide a material of an interlayer insulation layer, and a reflow process is performed at a temperature about 700° C. or over in an wet atmosphere so that the interlayer insulation layer is formed from the film. Furthermore, a dehydration process is performed at about 700° C. or lower in an inert gas atmosphere after the reflow process is performed.
Abstract:
An active vibration insulator includes an electromagnetic actuator, a control-signals generating device, a driver, a calculator, and a judging device. The electromagnetic actuator generates vibrating forces depending on electric-current supplies. The control-signals generating device generates cyclic control signals based on cyclic pulsating signals output from a vibration generating source of a vehicle. The cyclic control signals actively inhibit vibrations generated by the vibration generating source from transmitting to a specific part of the vehicle. The driver drives the electromagnetic actuator by making the electric-current supplies variable based on the cyclic control signals. The calculator calculates an estimated transfer function composed of estimated values of a transfer function for a transfer system including the electromagnetic actuator and the driver. The judging device judges an inoperative malfunction of the electromagnetic actuator based the estimated transfer function.
Abstract:
A method of manufacturing a silicon carbide semiconductor device having a MOS structure includes preparing a substrate made of silicon carbide, and forming a channel region, a first impurity region, a second impurity region, a gate insulation layer, and a gate electrode to form a semiconductor element on the substrate. In addition, a film is formed on the semiconductor element to provide a material of an interlayer insulation layer, and a reflow process is performed at a temperature about 700° C. or over in an wet atmosphere so that the interlayer insulation layer is formed from the film. Furthermore, a dehydration process is performed at about 700° C. or lower in an inert gas atmosphere after the reflow process is performed.