公开(公告)号：US4926618A

公开(公告)日：1990-05-22

申请号：US292822

申请日：1989-01-03

Applicant: Charles Ratliff

Inventor： Charles Ratliff

IPC: B01D53/06 ,  B01D53/26 ,  F24F3/14 ,  F24F3/147

CPC classification number: F24F3/1423 ,  B01D53/06 ,  B01D53/261 ,  B01D2253/106 ,  B01D2253/3425 ,  B01D2257/80 ,  B01D2258/0216 ,  B01D2259/40009 ,  B01D2259/4009 ,  F24F2003/1464 ,  F24F2203/1004 ,  F24F2203/102 ,  F24F2203/1032 ,  F24F2203/106 ,  F24F2203/1072 ,  F24F2203/1084 ,  F24F2203/1088

Abstract: A dehumidification system includes a rotating bed containing a mass of thermally regenerable desiccant divided into a process sector and a regeneration sector. Process air flows through the process sector and regenerant air flows through the regeneration sector. A damper is provided for controlling the flow of the regenerant air, and a heating element is interposed between the damper and the regeneration sector to heat the regenerant air upstream of the regeneration sector. A recycle stream portion of the regenerant air is recirculated and conducted downstream of the ambient make-up air damper for at least one additional pass through the heating element and the regeneration sector. A heat exchanger is interposed between the process air downstream of the process sector of the rotating bed and the regenerant air upstream of the regeneration sector of the rotating bed for transferring heat from the process air to the regenerant air. The procss air flows through the heat exchanger to produce an increasing temperature profile along one direction in the heat exchanger, and the regenerant air flows through the heat exchanger in the direction of the increasing temperature profile. A baffle is associated with the heat exchanger having a flow resistance comparable to the flow resistance of the heat exchanger so that the flow of process sector is proportional. A master controller is provided that controls the air stream flow rates and desiccant bed wheel speed in order to fully regenerate a fixed mass of the desiccant material under any operating condition.

Abstract translation: 除湿系统包括旋转床，其包含大量可热再生干燥剂，其分为加工部分和再生部分。 过程空气流过过程部分，再生剂空气流过再生部门。 设置有用于控制再生空气流动的阻尼器，并且在阻尼器和再生扇区之间插入加热元件，以加热再生扇区上游的再生空气。 再生空气的再循环流部分被再循环并在环境补充空气阻尼器的下游传导，以至少一次通过加热元件和再生扇区。 热交换器插入在旋转床的加工部分下游的处理空气和旋转床的再生扇区上游的再生空气之间，用于将热量从处理空气传递到再生空气。 过滤空气流过热交换器以在热交换器中沿着一个方向产生升高的温度分布，并且再生剂空气沿着增加的温度曲线的方向流过热交换器。 挡板与具有与热交换器的流动阻力相当的流动阻力的热交换器相关联，使得过程扇区的流量成比例。 提供主控制器，其控制空气流量和干燥剂床轮速度，以便在任何操作条件下完全再生干燥剂材料的固定质量。

公开(公告)号：US4847792A

公开(公告)日：1989-07-11

申请号：US046497

申请日：1987-05-04

Applicant: Gabriel G. Barna ,  Charles Ratliff

Inventor： Gabriel G. Barna ,  Charles Ratliff

IPC: H01J37/32

CPC classification number: H01J37/32935

Abstract: An apparatus and process for detecting aberrations in production process operations is provided. In one embodiment, operations of a plasma etch reactor (10) are monitored to detect aberrations in etching operations. A reference end-point trace (EPT) is defined (50), regions are defined in the reference EPT (52) and characteristics and tolerances for each region are defined (54). The etcher is run (56) and an actual EPT is obtained from the running of the etcher. The actual EPT is analyzed (58) by comparing characteristics of the regions of the actual EPT with characteristics of corresponding regions of the reference EPT. If the characteristics of the actual EPT exceed those of the reference EPT by predefined tolerances (62) a signal is generated (68). The system also checks for aberrations which are manifested by predefined EPT characteristics and signals when those are detected.

Abstract translation: 提供了一种用于检测生产过程操作中的像差的装置和方法。 在一个实施例中，监测等离子体蚀刻反应器（10）的操作以检测蚀刻操作中的像差。 定义参考端点轨迹（EPT）（50），在参考EPT（52）中定义区域，并且定义每个区域的特征和公差（54）。 蚀刻器运行（56），并且从蚀刻器的运行获得实际的EPT。 通过比较实际EPT的区域与参考EPT的相应区域的特性的特征来分析实际EPT（58）。 如果通过预定义的公差（62）实际EPT的特性超过参考EPT的特性，则产生信号（68）。 该系统还检查在检测到这些异常时，由预定义的EPT特性和信号表现出的像差。