Method for determining the thickness and refractive index of a layer using a shape feature during analysis

    公开(公告)号:US11371831B2

    公开(公告)日:2022-06-28

    申请号:US17260356

    申请日:2019-07-17

    摘要: The invention relates to a method for determining the thickness and refractive index of a layer (6) on a substrate (26). The layer (6) having a layer boundary surface (30) facing the substrate (26) and a layer top side (28) facing away from the substrate (26). In said method, the following steps are performed; imaging the layer (6), by confocal microscopy, along an optical axis (8), determining a point spread function resolved along the optical axis (8) al the layer boundary surface (30) and the layer lop side (28), determining an apparent thickness of the layer at a lateral point of the layer from the distance between two maxima of the point spread function, determining the widening of a maximum that the point spread function has at the layer boundary surface (30) relative to the width of the same maximum that the point spread function has at the layer top side (28), at the lateral point, and determining the thickness and refractive index of the layer (6) at the lateral point from the apparent thickness and the widening.

    DISTANCE MEASURING DEVICE AND METHOD FOR ASCERTAINING A SPATIAL ORIENTATION OF A SAMPLE CARRIER IN MICROSCOPY

    公开(公告)号:US20230384575A1

    公开(公告)日:2023-11-30

    申请号:US18203208

    申请日:2023-05-30

    IPC分类号: G02B21/26 G01S17/08

    CPC分类号: G02B21/26 G01S17/08

    摘要: A distance measuring device in microscopy contains a sample stage for arranging a sample carrier in a sample plane, and at least one, preferably at least two illumination sources for providing measurement radiation, which is reflected at least proportionally at a surface of the sample carrier. The device also contains a detection optical unit for capturing an overview image and occurring reflections at the sample carrier present in the sample plane; a detector disposed downstream of the detection optical unit and serving for the spatially resolved capture of image data of the sample carrier and of occurring reflections; and an evaluation device for ascertaining at least a distance of the surface at at least one location of the sample carrier. The illumination sources emit the measurement radiation in each case at a divergent emission angle. A corresponding method can be used for ascertaining a spatial orientation of a sample carrier.

    Method for generating an overview image using a large aperture objective

    公开(公告)号:US20210239961A1

    公开(公告)日:2021-08-05

    申请号:US17052560

    申请日:2019-06-04

    IPC分类号: G02B21/36 G02B21/00

    摘要: A method is useful for generating an overview image using a high-aperture objective. An optical detection beam path with the objective is provided. The path is transferred into a second operating state via a first depth of field increased to a second depth of field. Detection radiation is captured in the second operating state. Detection radiation coming from the sample space is collected by the objective, guided along the path, and captured by a detector sensitive to detection radiation as an image with a lateral image field, which is the same in the first and second operating states.

    Illumination apparatus for a microscope, method for operating it, and microscope having an illumination apparatus

    公开(公告)号:US11314068B2

    公开(公告)日:2022-04-26

    申请号:US16574437

    申请日:2019-09-18

    IPC分类号: G02B21/00 G02F1/13 G02B21/08

    摘要: The invention relates to an illumination apparatus for a microscope, a microscope and a method for operating the illumination apparatus. The illumination apparatus has a sample space for holding a sample that is to be illuminated, and at least one laser light source. An objective for the directional emission of laser radiation of a first wavelength along a first optical axis that is directed into the sample space, and with a cover of the sample space by which the sample space is delimited at least on one of its sides. The cover further has a layer that is either impenetrable for the laser radiation over a blocking angle range of the illumination angle and is transmissive for radiation of a second wavelength over a transmitted light angle range, or has a controllable layer that, in a first control state, is transparent for radiation of the second wavelength and, in a second control state, is impenetrable for the laser radiation of the first wavelength.

    Illumination apparatus for a microscope, method for operating it, and microscope having an illumination apparatus

    公开(公告)号:US20200096752A1

    公开(公告)日:2020-03-26

    申请号:US16574437

    申请日:2019-09-18

    IPC分类号: G02B21/00 G02F1/13

    摘要: The invention relates to an illumination apparatus for a microscope, a microscope and a method for operating the illumination apparatus. The illumination apparatus has a sample space for holding a sample that is to be illuminated, and at least one laser light source. An objective for the directional emission of laser radiation of a first wavelength along a first optical axis that is directed into the sample space, and with a cover of the sample space by which the sample space is delimited at least on one of its sides. The cover further has a layer that is either impenetrable for the laser radiation over a blocking angle range of the illumination angle and is transmissive for radiation of a second wavelength over a transmitted light angle range, or has a controllable layer that, in a first control state, is transparent for radiation of the second wavelength and, in a second control state, is impenetrable for the laser radiation of the first wavelength.