公开(公告)号：US20160020064A1

公开(公告)日：2016-01-21

申请号：US14803342

申请日：2015-07-20

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Alexander Laue ,  Albrecht Glasmachers ,  Christian Hendrich ,  Dirk Preikszas ,  Michel Aliman ,  Hubert Mantz ,  Ulrike Zeile ,  Holger Doemer

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/18 ,  H01J37/12 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/049 ,  H01J2237/1516 ,  H01J2237/182

Abstract: An apparatus for focusing and for storage of ions and an apparatus for separation of a first pressure area from a second pressure area are disclosed, in particular for an analysis apparatus for ions. A particle beam device may have at least one of the abovementioned apparatuses. A container for holding ions and at least one multipole unit are provided. The multipole unit has a through-opening with a longitudinal axis as well as a multiplicity of electrodes. A first set of the electrodes is at a first radial distance from the longitudinal axis. A second set of the electrodes is in each case at a second radial distance from the longitudinal axis. The first radial distance is less than the second radial distance. Alternatively or additionally, the apparatus may have an elongated opening with a radial extent. The opening has a longitudinal extent which is greater than the radial extent.

Abstract translation: 公开了一种用于聚焦和存储离子的装置和用于将第一压力区域与第二压力区域分离的装置，特别是用于离子分析装置。 粒子束装置可以具有上述装置中的至少一个。 提供了用于保持离子和至少一个多极单元的容器。 多极单元具有纵向轴线的通孔以及多个电极。 第一组电极处于距纵向轴线的第一径向距离处。 在每种情况下，第二组电极距离纵向轴线的第二径向距离。 第一径向距离小于第二径向距离。 或者或另外，该装置可以具有径向范围的细长开口。 开口具有大于径向范围的纵向范围。

公开(公告)号：US20140326874A1

公开(公告)日：2014-11-06

申请号：US14279957

申请日：2014-05-16

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Albrecht Glasmachers ,  Alexander Laue ,  Michel Aliman ,  Hubert Mantz ,  Ulrike Zeile ,  Holger Doemer

IPC: H01J37/26 ,  H01J49/10 ,  H01J37/28 ,  H01J3/26

CPC classification number: H01J37/265 ,  H01J3/26 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J49/063 ,  H01J49/065 ,  H01J49/10 ,  H01J2237/05 ,  H01J2237/2449 ,  H01J2237/2527

Abstract: An apparatus for transmission of energy of an ion to at least one gas particle and/or for transportation of an ion and a particle beam device having an apparatus such as this are disclosed. In particular, a container is provided, in which a gas is arranged which has gas particles, wherein the container has a transport axis. Furthermore, at least one first multipole unit and at least one second multipole unit are provided, which are arranged along the transport axis. The first multipole unit and the second multipole unit are formed by printed circuit boards. Furthermore, an electronic circuit is provided, which provides each multipole unit with a potential, such that a potential gradient is generated, in particular along the transport axis.

Abstract translation: 公开了一种用于将离子的能量传输到至少一个气体颗粒和/或用于输送离子的装置和具有这样的装置的粒子束装置。 特别地，提供一种容器，其中布置有气体颗粒的气体，其中容器具有输送轴线。 此外，提供沿着输送轴线布置的至少一个第一多极单元和至少一个第二多极单元。 第一多极单元和第二多极单元由印刷电路板形成。 此外，提供了一种电子电路，其为每个多极单元提供电势，使得产生电位梯度，特别是沿输送轴。