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    DEFORMABLE MIRRORS AND METHODS OF MAKING THE SAME
    1.
    发明申请
    DEFORMABLE MIRRORS AND METHODS OF MAKING THE SAME 审中-公开
    可变形反射镜及其制造方法

    公开(公告)号：US20130301113A1

    公开(公告)日：2013-11-14

    申请号：US13865179

    申请日：2013-04-17

    Applicant: California Institute of Technology

    Inventor： Sergio Pellegrino ,  Keith D. Patterson ,  Chiara Daraio ,  Eleftherios Gdoutos ,  Namiko Yamamoto ,  Risaku Toda ,  Victor E. White ,  Harish Manohara ,  John B. Steeves

    IPC: G02B26/08

    CPC classification number: G02B26/08 ,  B22D25/06 ,  B32B7/02 ,  B32B15/043 ,  B81B3/0072 ,  C04B35/62218 ,  G02B26/0825 ,  Y10T428/1234 ,  Y10T428/24149

    Abstract: A deformable mirror is configured to be deformed by surface-parallel actuation. In one embodiment, the deformable mirror includes a first piezoelectric active layer on a first surface of a substrate. The first piezoelectric active layer has a substantially uniform thickness across the first surface of the substrate. The mirror also includes a first electrode layer on the first piezoelectric active layer. The first electrode layer has a plurality of electrodes arranged in a first pattern and has a substantially uniform thickness across the first piezoelectric active layer. The mirror may further include a second piezoelectric layer on the first electrode layer, and a second electrode layer on the second piezoelectric layer. The electrodes of the first and second electrode layers are configured to supply a voltage to the piezoelectric active layers upon actuation to thereby locally deform the shape of the mirror to correct for optical aberrations.

    Abstract translation: 可变形反射镜被构造成通过表面平行致动而变形。 在一个实施例中，可变形反射镜包括在基板的第一表面上的第一压电有源层。 第一压电有源层在衬底的第一表面上具有基本均匀的厚度。 反射镜还包括在第一压电有源层上的第一电极层。 第一电极层具有布置成第一图案的多个电极，并且跨越第一压电有源层具有基本均匀的厚度。 反射镜还可以包括第一电极层上的第二压电层和第二压电层上的第二电极层。 第一和第二电极层的电极构造成在致动时向压电有源层提供电压，从而局部地使反射镜的形状变形以校正光学像差。

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